Evolution and Application of Digital Micromirror Device Based Maskless Photolithography

Ziyi Zhou; Xianzi Dong; Meiling Zheng

doi:10.3788/LOP202259.0922030

Journals >Laser & Optoelectronics Progress >Volume 59 >Issue 9 >Page 0922030 > Article

Laser & Optoelectronics Progress
Vol. 59, Issue 9, 0922030 (2022)

Evolution and Application of Digital Micromirror Device Based Maskless Photolithography

Ziyi Zhou^1、2, Xianzi Dong^1、**, and Meiling Zheng^1、*

Author Affiliations

¹CAS Key Laboratory of Bio-Inspired Materials and Interfacial Science, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing 100190, China

²School of Future Technology, University of Chinese Academy of Sciences, Beijing 101407, China

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DOI: 10.3788/LOP202259.0922030 Cite this Article Set citation alerts

Ziyi Zhou, Xianzi Dong, Meiling Zheng. Evolution and Application of Digital Micromirror Device Based Maskless Photolithography[J]. Laser & Optoelectronics Progress, 2022, 59(9): 0922030 Copy Citation Text

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Ziyi Zhou, Xianzi Dong, Meiling Zheng. Evolution and Application of Digital Micromirror Device Based Maskless Photolithography[J]. Laser & Optoelectronics Progress, 2022, 59(9): 0922030

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