[2] Gioti M, Logothetidis S, Charitidis C A et al. On the properties and functionality of ultra-thin diamond related protective coatings used in optical systems[J]. Sensors and Actuators A: Physical, 99, 35-40(2002).
[4] Han J B, Dou Y B, Wei M et al. Antireflection/antifogging coatings based on nanoporous films derived from layered double hydroxide[J]. Chemical Engineering Journal, 169, 371-378(2011).
[6] Lin C, Chang H M, Chang C. Fabrication of high transparency diamond-like carbon film coating on D263T glass at room temperature as an antireflection layer[J]. International Journal of Photoenergy, 2013, 1-8(2013).
[8] Mazur M, Wojcieszak D, Kaczmarek D et al. Functional photocatalytically active and scratch resistant antireflective coating based on TiO2 and SiO2[J]. Applied Surface Science, 380, 165-171(2016).
[9] Asghar M H, Placido F, Naseem S. Reactively evaporated multilayer antireflection coatings for Ge optical window[J]. Journal of Physics D, 40, 2065-2070(2007).
[10] Beck U, Smith D T, Reiners G et al. Mechanical properties of SiO2 and Si3N4 coatings: a BAM/NIST co-operative project[J]. Thin Solid Films, 332, 164-171(1998).
[11] Li Y Q. Preparation of SiNx films on hard disk and property analysis[D]. Dalian: Dalian University of Technology(2006).
[12] Haug F J, Schwaller P, Wloka J et al. Stoichiometry dependence of hardness, elastic properties, and oxidation resistance in TiN/SiNx nanocomposites deposited by a hybrid process[J]. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 22, 1229-1234(2004).
[13] Hultman L, Bareno J, Flink A et al. Interface structure in superhard TiN-SiN nanolaminates and nanocomposites: film growth experiments and ab initio calculations[J]. Physical Review B, 75, 155437(2007).
[14] Tang J F, Gu P F, Liu X[M]. Modern optical thin film technology, 43, 81-83.