Dongmei Liu, Pengfei Yue, Xiuhua Fu, Hongyu Cao, Jing Zhang, Shuang Li. Preparation of SixNy/SiO2 Hard Antireflection Film in Visible Light Band[J]. Laser & Optoelectronics Progress, 2020, 57(15): 153101
- Laser & Optoelectronics Progress
- Vol. 57, Issue 15, 153101 (2020)
Fig. 1. Diagram of effective interface method
Fig. 2. Refractive index of two materials. (a) SiO2; (b) SixNy
Fig. 3. Single-sided reflectivity test curves under different N2 gas flow
Fig. 4. Sensitivity distribution of the film
Fig. 5. Comparison of design and test curves
Fig. 6. Extinction coefficient of SixNy monolayer film
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Table 1. Process parameters
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Table 2. Hardness of different samples
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Table 3. SixNy film hardness under different N2 inflation
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Table 4. Process parameters of N2 gradient test
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Table 5. Film hardness under different N2 inflation
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Table 6. Actual physical thickness of each film after adjustment
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