• Photonics Research
  • Vol. 4, Issue 3, 0126 (2016)
Timo Lipka*, Lennart Moldenhauer, J?rg Müller, and Hoc Khiem Trie
Author Affiliations
  • Institute of Microsystems Technology, Hamburg University of Technology, 21073 Hamburg, Germany
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    DOI: 10.1364/prj.4.000126 Cite this Article Set citation alerts
    Timo Lipka, Lennart Moldenhauer, J?rg Müller, Hoc Khiem Trie. Photonic integrated circuit components based on amorphous silicon-on-insulator technology[J]. Photonics Research, 2016, 4(3): 0126 Copy Citation Text show less
    Calculated coupling efficiencies and 3 dB bandwidth of shallow-etch (SE) GCs with/without DBR and of the AGC.
    Fig. 1. Calculated coupling efficiencies and 3 dB bandwidth of shallow-etch (SE) GCs with/without DBR and of the AGC.
    Measured coupling efficiency of the AGCs with a micrograph and simulation inset.
    Fig. 2. Measured coupling efficiency of the AGCs with a micrograph and simulation inset.
    Propagation loss measurements for the TE0 mode. Inset: Mask layout of the meandered waveguides indicating a writing field.
    Fig. 3. Propagation loss measurements for the TE0 mode. Inset: Mask layout of the meandered waveguides indicating a writing field.
    Power splitting of DCs for different coupler lengths with schematic (inset).
    Fig. 4. Power splitting of DCs for different coupler lengths with schematic (inset).
    Bar and cross-port signals of an MZI.
    Fig. 5. Bar and cross-port signals of an MZI.
    Spectral characterization of add/drop microring filters: Microring with (a) 5 μm radius and (b) 10 μm radius.
    Fig. 6. Spectral characterization of add/drop microring filters: Microring with (a) 5 μm radius and (b) 10 μm radius.
    Q-factor and finesse of 5 and 10 μm radius add/drop filters measured for different coupling gaps.
    Fig. 7. Q-factor and finesse of 5 and 10 μm radius add/drop filters measured for different coupling gaps.
    (a) Even and odd supermodes of the asymmetric DC with electric field inset. (b) Mode indices of TE0, TM0, and TE1 versus waveguide widths illustrating the PSR principle.
    Fig. 8. (a) Even and odd supermodes of the asymmetric DC with electric field inset. (b) Mode indices of TE0, TM0, and TE1 versus waveguide widths illustrating the PSR principle.
    (a) Measurement setup and micrograph of the PSR. (b) PSR measurements with arbitrary input polarization and polarizer cube set to TE (x axis) and TM (y axis).
    Fig. 9. (a) Measurement setup and micrograph of the PSR. (b) PSR measurements with arbitrary input polarization and polarizer cube set to TE (x axis) and TM (y axis).
    Measured tuning efficiency of microheaters placed on top of a 10 μm resonator with microscope picture (inset).
    Fig. 10. Measured tuning efficiency of microheaters placed on top of a 10 μm resonator with microscope picture (inset).
    Resonance shift due to modifications of the effective mode index. Resonance trimming of an uncladded 10 μm MRR blueshifted in 1 nm increments.
    Fig. 11. Resonance shift due to modifications of the effective mode index. Resonance trimming of an uncladded 10 μm MRR blueshifted in 1 nm increments.
    Racetrack-based multiplexer TOE aligned to the 100 GHz DWDM grid with micrograph inset.
    Fig. 12. Racetrack-based multiplexer TOE aligned to the 100 GHz DWDM grid with micrograph inset.
    Through- and drop-port spectra of a wavelength-trimmed eight-channel multiplexer with micrograph.
    Fig. 13. Through- and drop-port spectra of a wavelength-trimmed eight-channel multiplexer with micrograph.
    (a) Spectral disorder of as-fabricated and trimmed OADMs. (b) Static power consumption for the eight-channel assignments of as-fabricated and trimmed OADMs.
    Fig. 14. (a) Spectral disorder of as-fabricated and trimmed OADMs. (b) Static power consumption for the eight-channel assignments of as-fabricated and trimmed OADMs.
    (a) Micrographs of a 4×4 photonic router and a MRR-switch. (b) Static measurements with inputs (I1−4) and output ports (O1−4) from top to bottom: Row 1: I1−O1−3. Row 2: I2−O2,3,4. Row 3: I3−O1,2,4. Row 4: I4−O2−4.
    Fig. 15. (a) Micrographs of a 4×4 photonic router and a MRR-switch. (b) Static measurements with inputs (I14) and output ports (O14) from top to bottom: Row 1: I1O13. Row 2: I2O2,3,4. Row 3: I3O1,2,4. Row 4: I4O24.
    Duty cycle123456789101112131415161718
    Bar (μm)0.600.560.560.570.570.560.550.550.540.540.540.530.530.530.500.420.450.61
    Gap (μm)0.180.180.180.180.200.240.220.200.200.200.230.240.240.250.350.260.23
    Table 1. Nonuniform AGC Parameters
    Ref.MaterialDim. (nm2)CladdingLoss (dB/cm)
    [30]a-/c-SOI (DUV)500×220SiO24.5/4
    [31]c-SOI (EBL)500×220HSQ0.92
    [32]a-SOI (EBL)470×220SiO21.2
    [33]c-SOI (DUV)450×220I-line (SiO2)5.74 (2.84)
    This worka-SOI (EBL)480×200I-line3.25
    Table 2. Linear Loss Comparison of a-SOI/c-SOI Photonic Wires
    Timo Lipka, Lennart Moldenhauer, J?rg Müller, Hoc Khiem Trie. Photonic integrated circuit components based on amorphous silicon-on-insulator technology[J]. Photonics Research, 2016, 4(3): 0126
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