• Acta Optica Sinica
  • Vol. 38, Issue 7, 0712007 (2018)
Guanji Dong1、2、*, Feng Tang1、3, Xiangzhao Wang1、2, Peng Feng1, Fudong Guo1, and Changzhe Peng1、2
Author Affiliations
  • 1 Laboratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2 University of Chinese Academy of Sciences, Beijing 100049, China
  • 3 State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, Jilin 130033, China
  • show less
    DOI: 10.3788/AOS201838.0712007 Cite this Article Set citation alerts
    Guanji Dong, Feng Tang, Xiangzhao Wang, Peng Feng, Fudong Guo, Changzhe Peng. Study on High Precision Magnification Measurement of Imaging Systems[J]. Acta Optica Sinica, 2018, 38(7): 0712007 Copy Citation Text show less
    Schematic of magnification measurement
    Fig. 1. Schematic of magnification measurement
    Schematic diagram of object plane fibers spacing measurement system
    Fig. 2. Schematic diagram of object plane fibers spacing measurement system
    Mathematical model of fiber spacing measurement
    Fig. 3. Mathematical model of fiber spacing measurement
    Wavefront and its Zernike coefficient obtained from ideal and non-ideal conditions. (a) Ideal wavefront; (b) ideal wavefront (without tilt); (c) Zernike coefficient of ideal wavefront; (d) non-ideal wavefront; (e) non-ideal wavefront (without tilt); (f) Zernike coefficient of non-ideal wavefront
    Fig. 4. Wavefront and its Zernike coefficient obtained from ideal and non-ideal conditions. (a) Ideal wavefront; (b) ideal wavefront (without tilt); (c) Zernike coefficient of ideal wavefront; (d) non-ideal wavefront; (e) non-ideal wavefront (without tilt); (f) Zernike coefficient of non-ideal wavefront
    Quantitative relationship among point source separation distance, spatial location parameter of the CCD camera, and the Zernike polynomial coefficient. (a) Quantitative relationship between point source spacing and Z2 term coefficient; (b) quantitative relationship between vertical distance and Z7 term coefficient; (c) quantitative relationship between CCD rotation angle and Z2 term coefficient; (d) quantitative relationship between CCD rotation angle and Z3 term coefficient; (e) quantitative re
    Fig. 5. Quantitative relationship among point source separation distance, spatial location parameter of the CCD camera, and the Zernike polynomial coefficient. (a) Quantitative relationship between point source spacing and Z2 term coefficient; (b) quantitative relationship between vertical distance and Z7 term coefficient; (c) quantitative relationship between CCD rotation angle and Z2 term coefficient; (d) quantitative relationship between CCD rotation angle and Z3 term coefficient; (e) quantitative re
    Flow chart of fiber spacing measurement algorithm
    Fig. 6. Flow chart of fiber spacing measurement algorithm
    Schematic diagram of image plane fibers’ imaging points separation distance measurement system
    Fig. 7. Schematic diagram of image plane fibers’ imaging points separation distance measurement system
    Spot center recognition results. (a),(b) Object location results; (c),(d) image location results
    Fig. 8. Spot center recognition results. (a),(b) Object location results; (c),(d) image location results
    Experimental wavefront and its Zernike coefficient values. (a) Object plane wavefront; (b) object plane wavefront (without tilt term); (c) Zernike coefficient of object plane wavefront; (d) image plane wavefront; (e) image plane wavefront (without tilt term); (f) Zernike coefficient of image plane wavefront
    Fig. 9. Experimental wavefront and its Zernike coefficient values. (a) Object plane wavefront; (b) object plane wavefront (without tilt term); (c) Zernike coefficient of object plane wavefront; (d) image plane wavefront; (e) image plane wavefront (without tilt term); (f) Zernike coefficient of image plane wavefront
    Measurement repeatability of Zernike polynomial coefficient. (a) Object plane measurement result; (b) image plane measurement result
    Fig. 10. Measurement repeatability of Zernike polynomial coefficient. (a) Object plane measurement result; (b) image plane measurement result
    Magnification measurement error /10-6Fiber separation distance measurement error /nm
    10.0620
    51.5509
    106.2035
    Table 1. Error requirement of fiber spacing measurement
    Simulation parameterIdeal conditionNon-ideal condition
    Light source wavelength λ /nm532532
    Interference region produced by fiber /(pixel×pixel)400×400400×400
    Pixel size /μm9.9×9.99.9×9.9
    d /μm254254
    z /mm32.94132.941
    θ /(°)03
    γx /(°)02
    γy /(°)01
    Table 2. Settings of simulation conditions
    Initial parameter setting of iterative calculationSetting value
    dEstimating rough value d0 according to the position of fiber end
    zUsing the tool to measure the rough value z0
    θCalculation according to the formula:θ=tan-1(-Z03/Z02)
    γxSetting to 0°
    γySetting to 0°
    Table 3. Initial parameter setting of iterative calculation
    ParameterTerm of Zernike polynomialQuantitative relationship typeCalculation formula
    dZ2Linear relationshipdcal=dcur+(Z02-Z2cur)/Z2d
    zZ7Linear relationshipzcal=zcur+(Z07-Z7cur)/Z7z
    θZ2Cosine relationshipθcalcur+(Z03-Z3cur)/Z3θ
    Z3Sine relationship
    γxZ4Linear relationship
    Z6Linear relationshipγxcal=γxcur+(Z04-Z4cur)/Z4γxγycal=γycur+(Z06-γxcal×Z6γx-Z6cur)/Z6γy
    γyZ4Uncorrelated
    Z6Linear relationship
    Table 4. Quantitative relationship among two fibers separation distance, spatial position parameters of the CCD camera, and the Zernike polynomial coefficient, and its calculation formula
    Average valueStandard deviationMaximum valueMinimum value
    Number of iterations14.60000.490015.000014.0000
    Measurement error of fiber separation distance /nm0.55000.93375.00000
    Table 5. Simulation results of the effectiveness of the method for measuring the separation distance between two fibers
    ParameterInitial value1231011
    d /μm297.000315.307272.399267.318264.818264.817
    z /μm30000.00025877.26025380.07025219.26025140.38025140.350
    θ /(°)2.2311.9252.1882.2172.2312.231
    γx /(°)0-3.050-3.411-3.433-3.444-3.444
    γy /(°)00.015-0.015-0.018-0.020-0.020
    Table 6. Iterative calculation results of object plane separation distance between fibers
    ParameterInitial value12367
    d /μm49.50051.01150.91150.84350.81050.809
    z /μm6600.0006584.2316575.1576572.1806570.7116570.667
    θ /(°)2.3572.3522.3542.3562.3572.357
    γx /(°)01.6331.6331.6341.6351.635
    γy /(°)00.2490.2490.2490.2500.250
    Table 7. Iterative calculation results of image plane separation distance between fiber image points
    Guanji Dong, Feng Tang, Xiangzhao Wang, Peng Feng, Fudong Guo, Changzhe Peng. Study on High Precision Magnification Measurement of Imaging Systems[J]. Acta Optica Sinica, 2018, 38(7): 0712007
    Download Citation