• Acta Optica Sinica
  • Vol. 38, Issue 7, 0712007 (2018)
Guanji Dong1、2、*, Feng Tang1、3, Xiangzhao Wang1、2, Peng Feng1, Fudong Guo1, and Changzhe Peng1、2
Author Affiliations
  • 1 Laboratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2 University of Chinese Academy of Sciences, Beijing 100049, China
  • 3 State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, Jilin 130033, China
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    DOI: 10.3788/AOS201838.0712007 Cite this Article Set citation alerts
    Guanji Dong, Feng Tang, Xiangzhao Wang, Peng Feng, Fudong Guo, Changzhe Peng. Study on High Precision Magnification Measurement of Imaging Systems[J]. Acta Optica Sinica, 2018, 38(7): 0712007 Copy Citation Text show less

    Abstract

    In the view of the problem that there is no high precision universal magnification measurement methods and apparatus at present, a high precision magnification measuring method for imaging system based on double fiber point-diffraction interferometer is proposed. The separation distance between two fibers in object plane and the separation distance between the fibers’ imaging points in image plane are measured with nanometer accuracy by analyzing the quantitative relationship among the separation distance between double point source, spatial location of CCD camera and the Zernike polynomial coefficients of the phase distribution of the point-diffraction interference field. And then, high precision magnification measurement is achieved. Simulation and experimental verification have been carried out to demonstrate the feasibility and stability of the proposed measuring method. The results show that the expanded uncertainty of the magnification measurement is 2.64×10 -6. The proposed method has the merits of high accuracy, high efficiency and high reliability. It can be used to measure the magnification of high accuracy imaging system with ultra-high precision, such as microscope objectives and lithographic projection lens.
    Guanji Dong, Feng Tang, Xiangzhao Wang, Peng Feng, Fudong Guo, Changzhe Peng. Study on High Precision Magnification Measurement of Imaging Systems[J]. Acta Optica Sinica, 2018, 38(7): 0712007
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