Hot-wire chemical vapor deposition low-loss hydrogenated amorphous silicon waveguides for silicon photonic devices

Swe Z. Oo; Antulio Tarazona; Ali Z. Khokhar; Rafidah Petra; Yohann Franz; Goran Z. Mashanovich; Graham T. Reed; Anna C. Peacock; Harold M. H. Chong

doi:10.1364/PRJ.7.000193

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