Xiaorang Tian, Peide Han, Guanchao Zhao, Rong Yang, Liwei Li, Yuan Meng, Ted Guo. Pyramid size control and morphology treatment for high-efficiency silicon heterojunction solar cells[J]. Journal of Semiconductors, 2019, 40(3): 032703
- Journal of Semiconductors
- Vol. 40, Issue 3, 032703 (2019)
Fig. 1. (Color online) Symmetrical a-Si:H(i)/c-Si/a-Si:H(i) structure for lifetime test structure.
Fig. 2. (Color online) Schematic cross-section of the silicon heterojunction solar cell structure.
Fig. 3. (Color online) An optical microscopy image of the silicon surface during the texturing progress.
Fig. 4. (Color online) A schematic diagram of pyramidal structure forming on wafer surface.
Fig. 5. (Color online) The etching amount increase with etching time.
Fig. 6. (Color online) The relationship between pyramid sizes and etching amounts at the transition.
Fig. 7. The formation process of both large and small pyramids.
Fig. 8. Scanning electron microscope (SEM) images of samples with various pyramid sizes.
Fig. 9. (Color online) The influence of pyramid size distribution on MCLT and V oc.
Fig. 10. (Color online) The transmission electron microscopy (TEM) image at the a-Si:H(i)/c-Si interface of excessively small pyramid.
Fig. 11. (Color online) The influences of pyramid size on wafer reflection and J sc.
Fig. 12. (Color online) The relationship between FF/PFF/R s and pyramid size.
Fig. 13. (Color online) The influence of pyramid size on solar cell effciency.
Fig. 14. Typical SEM images of a pyramid as-textured and post-smoothing: (a) and (c) is the valley and the tip of pyramid as-textured; (b) and (d) is the valley and the tip of pyramid post-smoothing.
Fig. 15. (Color online) Comparison of minority carrier lifetime with and without smoothing process.
Fig. 16. (Color online) Comparison of (a) V oc, (b) PFF, and (c) Eff between solar cells with and without the smoothing process.
Fig. 17. (Color online) Illuminated I–V characteristics of SHJ cell of 23.6% efficiency.
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Table 1. The etching amount at the transition point and the pyramid size under different texturing conditions.
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