Microstructure Design and Preparation of CD Pattern Diffuser

Xiaojing Liu; Zhimou Xu; Guoping Zong; Xianyi Wang

doi:10.3788/LOP56.212201

Journals >Laser & Optoelectronics Progress >Volume 56 >Issue 21 >Page 212201 > Article

Laser & Optoelectronics Progress
Vol. 56, Issue 21, 212201 (2019)

Microstructure Design and Preparation of CD Pattern Diffuser

Xiaojing Liu¹, Zhimou Xu^1、*, Guoping Zong², and Xianyi Wang²

Author Affiliations

¹School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan, Hubei 430074, China

²Hubei Shen'an Yaming Lighting Technology Co., Ltd., Tianmen, Hubei 431728, China

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DOI: 10.3788/LOP56.212201 Cite this Article Set citation alerts

Xiaojing Liu, Zhimou Xu, Guoping Zong, Xianyi Wang. Microstructure Design and Preparation of CD Pattern Diffuser[J]. Laser & Optoelectronics Progress, 2019, 56(21): 212201 Copy Citation Text

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Xiaojing Liu, Zhimou Xu, Guoping Zong, Xianyi Wang. Microstructure Design and Preparation of CD Pattern Diffuser[J]. Laser & Optoelectronics Progress, 2019, 56(21): 212201

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