Study on High Reflective Film in 121.6 nm Far Ultraviolet

Jinyan Wang; Jinlong Zhang; Hongfei Jiao; Xinbin Cheng

doi:10.3788/AOS202040.0931001

Journals >Acta Optica Sinica >Volume 40 >Issue 9 >Page 0931001 > Article

Acta Optica Sinica
Vol. 40, Issue 9, 0931001 (2020)

Study on High Reflective Film in 121.6 nm Far Ultraviolet

Jinyan Wang^1、2, Jinlong Zhang^1、2、*, Hongfei Jiao^1、2, and Xinbin Cheng^1、2

Author Affiliations

¹Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai, 200092, China

²MOE Key Laboratory of Advanced Micro-Structured Materials, Tongji University, Shanghai, 200092, China

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DOI: 10.3788/AOS202040.0931001 Cite this Article Set citation alerts

Jinyan Wang, Jinlong Zhang, Hongfei Jiao, Xinbin Cheng. Study on High Reflective Film in 121.6 nm Far Ultraviolet[J]. Acta Optica Sinica, 2020, 40(9): 0931001 Copy Citation Text

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Jinyan Wang, Jinlong Zhang, Hongfei Jiao, Xinbin Cheng. Study on High Reflective Film in 121.6 nm Far Ultraviolet[J]. Acta Optica Sinica, 2020, 40(9): 0931001

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