Xinpeng Li, Deyang Yu, Qikun Pan, Ranran Zhang, Kuo Zhang, Jin Guo, Fei Chen. Beam Pointing Stability of Extreme Ultraviolet Lithography Light Source System[J]. Laser & Optoelectronics Progress, 2021, 58(17): 1714004
- Laser & Optoelectronics Progress
- Vol. 58, Issue 17, 1714004 (2021)
Fig. 1. Schematic diagram of laser beam jitter. (a)
Fig. 2. Schematic diagram of angular deviation measurement
Fig. 3. Schematic diagram of beam monitoring and control
Fig. 4. Steady-state error of position before control
Fig. 5. Steady state error of position after control. (a) 1‒102 s; (b) 255‒357 s; (c) 750‒852 s
Fig. 6. Beam pointing stability
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Table 1. Jitter of center of mass before and after beam alignment
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