ALD materials | Precursors | Temperature (℃)
| QDs | QDs applications | ZnO53-60 | DEZ (Diethyl Zinc)+O253DEZ+H2O54-59 | 27–7555, 7557, < 10060, 10054, 15056, 18058, 20059, 22053 | ZnO58PbS56PbSe55, 57CdSe53, 54CdSe/CdS/ZnS59CsPbBr360 | Film53, 54, 57-59FET55 Solar cell55, 56LED60 | Al2O345, 46, 55-58, 60-91 | TMA (Trimethyl Aluminum)
+H2O55-57, 61, 62, 65-70, 72-74, 76, 77, 79-89TMA+O2 plasma88TMA+Air75, 91TMA+O271TMA+N2O plasma63 | 18 ± 175, 27–755527–12583, 2774, 80, 895070, 30–180737078, 75578062, 63, 84, 8779< 10060, 10069, 81, 1106615056, 61, 67, 68, 72, 8716085, 17582, 1805819077, 20088, 25086 | ZnO58, 76CdTe73, CdS82CdSe86, 88CdSe/ZnS61, 66, 77, 87ZnCdSSe/ZnS68CdSe@ZnS/ZnS63CdSe/CdS/ZnS69, 71PbS56, 67, 72, 78, 81, 83-85, 89PbSe55, 57, 74, 79, 80APbX360, 65, 70, 75 | Sphere65Film57, 58, 66, 69, 70, 73, 74, 77FET55, 62, 76, 78-80, 83, 86, 88Solar cell56, 82, 84, 85Photodetector67, 81Photocatalysis72LED60, 61, 63, 68, 71, 75, 87, 91 | TiO262, 92-94 | Ti(OiPr)4 (Titanium isopropoxide)+H2O92, 93TDMAT(Tetrakis(dimethylamido)titanium)
+H2O62, 94 | 8062, 15094, 20092, 93 | CdS92-94CdSe/CdS/ZnS62 | Film62Solar cell92, 93Photocatalysis94 | ZrO284 | TDMA-Zr(Tetrakis(dimethylamido)zirconium)+H2O84 | 8084 | PbS84 | Solar cell84 | HfO262, 76, 79 | TDMAH(Tetrakis(dimethylamino)hafnium)+H2O76, 79TEMAHf(Tetrakis(ethylmethylamino)hafnium)+O362 | 7576, 8062, 8779 | ZnO76CdSe/CdS/ZnS62PbSe79 | Film62, 76FET79 | ZnS62 | DEZ+H2S62 | 8062 | CdSe/CdS/ZnS62 | Film62 | AlN95 | TMA+ H2/N2/Ar plasma95 | 150, 20095 | CdSexTe1−x95 | Solar cell95 |
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