• Opto-Electronic Advances
  • Vol. 3, Issue 9, 190043-1 (2020)
Binze Zhou1, Mengjia Liu1, Yanwei Wen2, Yun Li1, and Rong Chen1、*
Author Affiliations
  • 1State Key Laboratory of Digital Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China
  • 2State Key Laboratory of Materials Processing and Die & Mould Technology, School of Materials Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China
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    DOI: 10.29026/oea.2020.190043 Cite this Article
    Binze Zhou, Mengjia Liu, Yanwei Wen, Yun Li, Rong Chen. Atomic layer deposition for quantum dots based devices[J]. Opto-Electronic Advances, 2020, 3(9): 190043-1 Copy Citation Text show less
    The corresponding challenges of QDs.(I) Non-radiative recombination corresponding to photoluminance decay. (Ⅱ) High specific surface area corresponding to degradation and failure. (Ⅲ) Long chain ligands corresponding to poor carrier transport. (Ⅳ) Interfacial carrier accumulation and recombination corresponding to heat and efficiency roll-off.
    Fig. 1. The corresponding challenges of QDs. (I) Non-radiative recombination corresponding to photoluminance decay. () High specific surface area corresponding to degradation and failure. () Long chain ligands corresponding to poor carrier transport. () Interfacial carrier accumulation and recombination corresponding to heat and efficiency roll-off.
    (a) PLQY value variation of QDs with TMA treatment time75. (b) Reaction schematic of TMA with QDs surface75. (c) PL lifetimes of QDs thin films before and after 20 cycles of alumina deposition69. (d) XPS spectra of Zn for QDs thin film before and after one cycle of alumina and Al after one cycle of alumina69. Figure reproduced from: (a, b) ref.75, Creative Commons Attribution 2.0 International License; (c, d) ref.69, American Chemical Society.
    Fig. 2. (a) PLQY value variation of QDs with TMA treatment time75. (b) Reaction schematic of TMA with QDs surface75. (c) PL lifetimes of QDs thin films before and after 20 cycles of alumina deposition69. (d) XPS spectra of Zn for QDs thin film before and after one cycle of alumina and Al after one cycle of alumina69. Figure reproduced from: (a, b) ref.75, Creative Commons Attribution 2.0 International License; (c, d) ref.69, American Chemical Society.
    (a) Cross-sectional TEM structure characterization and optical absorption spectra stability test before and after ALD treatment74. (b) EELS color-coded elemental intensity maps of Al and Br, CsPbBr3 QD/AlOx nanocomposites PL properties over 45 days of storage in ambient conditions and after 1 h of soaking in water70. Figure reproduced from: (a) ref.74, American Chemical Society; (b) ref.70, John Wiley and Sons.
    Fig. 3. (a) Cross-sectional TEM structure characterization and optical absorption spectra stability test before and after ALD treatment74. (b) EELS color-coded elemental intensity maps of Al and Br, CsPbBr3 QD/AlOx nanocomposites PL properties over 45 days of storage in ambient conditions and after 1 h of soaking in water70. Figure reproduced from: (a) ref.74, American Chemical Society; (b) ref.70, John Wiley and Sons.
    (a) Schematic of device architecture, FET electron mobility (black) and threshold voltage (blue) as a function of time stored and operated in air86. (b) TEM image of device structure and the relative power conversion efficiency (PCE) over time84. Figure reproduced from: (a) ref.86, American Chemical Society; (b) ref.84, AIP Publishing.
    Fig. 4. (a) Schematic of device architecture, FET electron mobility (black) and threshold voltage (blue) as a function of time stored and operated in air86. (b) TEM image of device structure and the relative power conversion efficiency (PCE) over time84. Figure reproduced from: (a) ref.86, American Chemical Society; (b) ref.84, AIP Publishing.
    (a) FTIR spectra of ALD-coated and uncoated thin films comprised of ZnO nanocrystals76. (b) XPS scans for Pb 4f and Al 2p of the AlxOy-PbS film78. (c) Ligands exchange and ALD infilling schematic resulting in barrier width and height reduce55. Figure reproduced from: (a) ref.76, American Chemical Society; (b) ref.78, AIP Publishing; (c) ref.55, American Chemical Society.
    Fig. 5. (a) FTIR spectra of ALD-coated and uncoated thin films comprised of ZnO nanocrystals76. (b) XPS scans for Pb 4f and Al 2p of the AlxOy-PbS film78. (c) Ligands exchange and ALD infilling schematic resulting in barrier width and height reduce55. Figure reproduced from: (a) ref.76, American Chemical Society; (b) ref.78, AIP Publishing; (c) ref.55, American Chemical Society.
    (a) Schematic of barrier layer configurations available in quantum dot-sensitized solar cells. Comparison of device efficiency and dark current onset for TiO2/Al2O3/QD and TiO2/QD/Al2O3 configurations under 1 sun of illumination with varying ALD cycles of Al2O382. (b) Band energy level diagram of each material in QLED. Current density of electron only device without and with Al2O3 interlayers, and hole only device. Device lifetime of QLEDs without and with Al2O3 interlayer63. Figure reproduced from: (a) ref.82, American Chemical Society; (b) ref.63, Creative Commons Attribution 3.0 International License.
    Fig. 6. (a) Schematic of barrier layer configurations available in quantum dot-sensitized solar cells. Comparison of device efficiency and dark current onset for TiO2/Al2O3/QD and TiO2/QD/Al2O3 configurations under 1 sun of illumination with varying ALD cycles of Al2O382. (b) Band energy level diagram of each material in QLED. Current density of electron only device without and with Al2O3 interlayers, and hole only device. Device lifetime of QLEDs without and with Al2O3 interlayer63. Figure reproduced from: (a) ref.82, American Chemical Society; (b) ref.63, Creative Commons Attribution 3.0 International License.
    (a) Schematic diagram of the ALD interface passivating mechanism61. (b) EDS mappings obtained after device operation for QLEDs without and with an Al2O3 barrier layer61. Figure reproduced from ref.61, American Chemical Society.
    Fig. 7. (a) Schematic diagram of the ALD interface passivating mechanism61. (b) EDS mappings obtained after device operation for QLEDs without and with an Al2O3 barrier layer61. Figure reproduced from ref.61, American Chemical Society.
    ALD materialsPrecursorsTemperature (℃) QDsQDs applications
    ZnO53-60DEZ (Diethyl Zinc)+O253DEZ+H2O54-5927–7555, 7557, < 10060, 10054, 15056, 18058, 20059, 22053ZnO58PbS56PbSe55, 57CdSe53, 54CdSe/CdS/ZnS59CsPbBr360Film53, 54, 57-59FET55 Solar cell55, 56LED60
    Al2O345, 46, 55-58, 60-91TMA (Trimethyl Aluminum) +H2O55-57, 61, 62, 65-70, 72-74, 76, 77, 79-89TMA+O2 plasma88TMA+Air75, 91TMA+O271TMA+N2O plasma6318 ± 175, 27–755527–12583, 2774, 80, 895070, 30–180737078, 75578062, 63, 84, 8779< 10060, 10069, 81, 1106615056, 61, 67, 68, 72, 8716085, 17582, 1805819077, 20088, 25086ZnO58, 76CdTe73, CdS82CdSe86, 88CdSe/ZnS61, 66, 77, 87ZnCdSSe/ZnS68CdSe@ZnS/ZnS63CdSe/CdS/ZnS69, 71PbS56, 67, 72, 78, 81, 83-85, 89PbSe55, 57, 74, 79, 80APbX360, 65, 70, 75Sphere65Film57, 58, 66, 69, 70, 73, 74, 77FET55, 62, 76, 78-80, 83, 86, 88Solar cell56, 82, 84, 85Photodetector67, 81Photocatalysis72LED60, 61, 63, 68, 71, 75, 87, 91
    TiO262, 92-94Ti(OiPr)4 (Titanium isopropoxide)+H2O92, 93TDMAT(Tetrakis(dimethylamido)titanium) +H2O62, 948062, 15094, 20092, 93CdS92-94CdSe/CdS/ZnS62Film62Solar cell92, 93Photocatalysis94
    ZrO284TDMA-Zr(Tetrakis(dimethylamido)zirconium)+H2O848084PbS84Solar cell84
    HfO262, 76, 79TDMAH(Tetrakis(dimethylamino)hafnium)+H2O76, 79TEMAHf(Tetrakis(ethylmethylamino)hafnium)+O3627576, 8062, 8779ZnO76CdSe/CdS/ZnS62PbSe79Film62, 76FET79
    ZnS62DEZ+H2S628062CdSe/CdS/ZnS62Film62
    AlN95TMA+ H2/N2/Ar plasma95150, 20095CdSexTe1−x95Solar cell95
    Table 1. Summary of ALD systems reported in literature for applications in QDs and QDs based devices
    Binze Zhou, Mengjia Liu, Yanwei Wen, Yun Li, Rong Chen. Atomic layer deposition for quantum dots based devices[J]. Opto-Electronic Advances, 2020, 3(9): 190043-1
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