Fabrication of 128-element uncooled VOx thermal IR detectors

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

[1] Baltes H, Paul O, Brand O. Micromachined thermally based CMOS microsensors[J]. Proc IEEE, 1998, 86(8):1660-1678

[2] Horn S, Lohrmann D, Campbell J, et al. Uncooled IR technology and application[J]. SPIE, 2001, 4639: 210-221

[3] Kinch M A. Fundamental physics of infrared detector materials[J]. J Electron Mater, 2000, 29:809-817

[4] Brady J, Schimert T, Gooch D, et al. Advances in amorphous silicon uncooled IR systems [J]. Proc SPIE Int Soc Opt Eng, 1999, 3698:191-197

[5] Almasri M, Butler D P, Celik B Z. Free standing amorphous Y-Ba-Cu-O detectors for uncooled IR detection and the effects of doping[J]. Proc SPIE int Soc Opt Eng, 1999,3794: 66-75

[6] CHEN Chang-Hong, YI XIN-Jian, ZHAO Xing-Yong, et al. Preparation and properties of vanadium dioxide thin film for uncooled microbolometer[ C ]. Beijing: 25th International Conference on Infrared and Millimeter Waves, 2000: 211-212

[7] CHEN Chang-Hong, YI Xin-Jian, ZHANG Jing, et al. Micromachined uncooled IR bolometer linear array using VO2 thin films[J]. Int J Infiared Millim Waves, 2001, 22( 1 ):53-57