Rui Zhou, Shengdong Lin, Ye Ding, Huan Yang, Kenny Ong Yong Keng, Minghui Hong. Enhancement of laser ablation via interacting spatial double-pulse effect[J]. Opto-Electronic Advances, 2018, 1(8): 180014
- Opto-Electronic Advances
- Vol. 1, Issue 8, 180014 (2018)
Fig. 1. Schematic diagram of the experimental setup for the spatial double-pulse laser ablation.
Fig. 2. SEM images, 3D reconstructions and 2D profiles of craters created by the splitted double-pulse laser beams at different gaps of (a) 100 μm, (b) 80 μm, (c) 60 μm, (d) 0 μm, and (e) by single laser beam at a total laser power of 10 W.
Fig. 3. SEM images of (a) two intersecting grooves processed by double laser pulses and (b) zoom-in state.
Fig. 4. The schematic diagram of distributions of energy field (upper), temperature field (middle) and the interaction between laser and silicon (bottom) at different gaps.(a ) Large gap. (b ) Optimal gap. (c ) Zero gap.
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