Aberration Analysis of Membrane Diffractive Lens with Substrate Deformation Error

Taojie Li; Peng Wu; Zheng Yang; Shaoyun Yin; Chunlei Du; Yuefeng Wang

doi:10.3788/AOS201737.1011003

Journals >Acta Optica Sinica >Volume 37 >Issue 10 >Page 1011003 > Article

Acta Optica Sinica
Vol. 37, Issue 10, 1011003 (2017)

Aberration Analysis of Membrane Diffractive Lens with Substrate Deformation Error

Taojie Li^1、2、3, Peng Wu^2、3, Zheng Yang^2、3, Shaoyun Yin^2、3, Chunlei Du^2、3, and Yuefeng Wang^1、*

Author Affiliations

¹ 1 Department of Electronic and Optical Engineering, Ordnance Engineering College, Chinese People′s Liberation Army, Shijiazhuang, Heibei 050003, China

² System Integration Center of Optics and Electronics, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China

³ Chongqing Key Laboratory of Multi-Scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China

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DOI: 10.3788/AOS201737.1011003 Cite this Article Set citation alerts

Taojie Li, Peng Wu, Zheng Yang, Shaoyun Yin, Chunlei Du, Yuefeng Wang. Aberration Analysis of Membrane Diffractive Lens with Substrate Deformation Error[J]. Acta Optica Sinica, 2017, 37(10): 1011003 Copy Citation Text

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Fig. 1. Light path diagram of membrane deformation

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Fig. 2. Wavefront aberration fitting process of complicated surface

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Fig. 3. Schematic of surface sag error

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Fig. 4. (a) Edge wrinkle surface; (b) sphere surface

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Fig. 5. (a) Spot diagram of spherical surface error; (b) results of ZEMAX corresponding to (a);(c) wavefront RMS aberration of spherical surface error; (d) results of ZEMAX corresponding to (c)

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Fig. 6. (a) Planform of wrinkle surface; (b) wavefront RMS aberration corresponding to (a)

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Fig. 7. Relationship between aberration types and surface peak-to-valley value. (a) Wrinkle surface; (b) spherical surface

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Fig. 8. Relationship between wavefront RMS aberration and surface peak-to-valley value. (a) Wrinkle surface; (b) spherical surface

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Fig. 9. Relationship between Strehl ratio and surface peak-to-valley value. (a) Wrinkle surface; (b) spherical surface

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Term	Polynomial	Aberration type
Z₂	2x	x tilt
Z₃	2y	y tilt
Z₄	$\begin{matrix} \sqrt[]{3} \end{matrix} \begin{matrix} [2 (x^{2} + y^{2}) - 1] \end{matrix}$	Defocus
Z₅	$\begin{matrix} \sqrt[]{6} \end{matrix} \begin{matrix} (2 xy) \end{matrix}$	Astigmatism y
Z₁₁	$\begin{matrix} \sqrt[]{5} \end{matrix} \begin{matrix} [6 {(x^{2} + y^{2})}^{2} - 6 (x^{2} + y^{2}) + 1] \end{matrix}$	Primary spherical
Z₂₂	$\begin{matrix} \sqrt[]{7} \end{matrix} \begin{matrix} [20 {(x^{2} + y^{2})}^{3} - 30 {(x^{2} + y^{2})}^{2} + 12 (x^{2} + y^{2}) - 1] \end{matrix}$	Secondary spherical
Z₂₃	$\begin{matrix} \sqrt[]{14} \end{matrix} \begin{matrix} [15 (x^{4} + y^{4}) + 30 x^{2} y^{2} - 20 (x^{2} + y^{2}) + 6] \end{matrix}$	Tertiary astigmatism y
Z₂₇	$\begin{matrix} \sqrt[]{14} \end{matrix} \begin{matrix} (6 x^{5} y - 20 x^{3} y^{3} + 6 x y^{5}) \end{matrix}$	Six foil y

Table 1. Standard Zernike polynomial and aberration type

Taojie Li, Peng Wu, Zheng Yang, Shaoyun Yin, Chunlei Du, Yuefeng Wang. Aberration Analysis of Membrane Diffractive Lens with Substrate Deformation Error[J]. Acta Optica Sinica, 2017, 37(10): 1011003

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