Aberration Analysis of Membrane Diffractive Lens with Substrate Deformation Error

Taojie Li; Peng Wu; Zheng Yang; Shaoyun Yin; Chunlei Du; Yuefeng Wang

doi:10.3788/AOS201737.1011003

Journals >Acta Optica Sinica >Volume 37 >Issue 10 >Page 1011003 > Article

Acta Optica Sinica
Vol. 37, Issue 10, 1011003 (2017)

Aberration Analysis of Membrane Diffractive Lens with Substrate Deformation Error

Taojie Li^1、2、3, Peng Wu^2、3, Zheng Yang^2、3, Shaoyun Yin^2、3, Chunlei Du^2、3, and Yuefeng Wang^1、*

Author Affiliations

¹ 1 Department of Electronic and Optical Engineering, Ordnance Engineering College, Chinese People′s Liberation Army, Shijiazhuang, Heibei 050003, China

² System Integration Center of Optics and Electronics, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China

³ Chongqing Key Laboratory of Multi-Scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China

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DOI: 10.3788/AOS201737.1011003 Cite this Article Set citation alerts

Taojie Li, Peng Wu, Zheng Yang, Shaoyun Yin, Chunlei Du, Yuefeng Wang. Aberration Analysis of Membrane Diffractive Lens with Substrate Deformation Error[J]. Acta Optica Sinica, 2017, 37(10): 1011003 Copy Citation Text

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Taojie Li, Peng Wu, Zheng Yang, Shaoyun Yin, Chunlei Du, Yuefeng Wang. Aberration Analysis of Membrane Diffractive Lens with Substrate Deformation Error[J]. Acta Optica Sinica, 2017, 37(10): 1011003

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