Chang-Yi PAN, Hao MOU, Xiao-Mei YAO, Tao HU, Yu WANG, Chao WANG, Hui-Yong DENG, Ning DAI. High performance Ge:B blocked impurity band detector developed using near-surface processing techniques[J]. Journal of Infrared and Millimeter Waves, 2022, 41(2): 389
- Journal of Infrared and Millimeter Waves
- Vol. 41, Issue 2, 389 (2022)
Fig. 1. Fabrication process of Ge：B BIB detector
Fig. 2. Doping profile of B in the absorbing region by five-steps-implantation
Fig. 3. Three-dimensional（3-D）schematic structure of Ge：B BIB detector
Fig. 4. Dark current of Ge：B BIB detector at different temperatures
Fig. 5. Responsivity in response to a 1000 K blackbody at 3.5 K
Fig. 6. Relative spectral response at 3.5 K
Fig. 7. Two excitation models in Ge：B BIB detector
Fig. 8. Normalized spectral response at different voltages at 3.5 K，and the inset is the ratio of the relative response intensity at 40 mV and 10 mV
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