Quantum chip is the basis of constructing practical computer based on the basic principle of quantum mechanics. Through the excellent research work in recent years, research teams of various countries had developed the Si based qubit chip technology into one of the core directions of quantum computing. In this paper, the main types of Si spin qubits were summarized, and the key technologies of high fidelity, long-range coupling and other indexes required for reliable quantum computing were analyzed. Research of these technologies showed that Si was a feasible platform for the development of comprehensive quantum computing.