• Journal of Semiconductors
  • Vol. 43, Issue 6, 062804 (2022)
Xuemin Zhang1、2, Changling Yan1, Jinghang Yang1, Chao Pang1, Yunzhen Yue1, Chunhong Zeng1、2, and Baoshun Zhang2
Author Affiliations
  • 1State Key Laboratory on High Power Semiconductor Lasers, Changchun University of Science and Technology, Changchun 130022, China
  • 2Nanofabrication Facility, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China
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    DOI: 10.1088/1674-4926/43/6/062804 Cite this Article
    Xuemin Zhang, Changling Yan, Jinghang Yang, Chao Pang, Yunzhen Yue, Chunhong Zeng, Baoshun Zhang. Vertical Schottky ultraviolet photodetector based on graphene and top–down fabricated GaN nanorod arrays[J]. Journal of Semiconductors, 2022, 43(6): 062804 Copy Citation Text show less

    Abstract

    GaN has been widely used in the fabrication of ultraviolet photodetectors because of its outstanding properties. In this paper, we report a graphene–GaN nanorod heterostructure photodetector with fast photoresponse in the UV range. GaN nanorods were fabricated by a combination mode of dry etching and wet etching. Furthermore, a graphene–GaN nanorod heterostructure ultraviolet detector was fabricated and its photoelectric properties were measured. The device exhibits a fast photoresponse in the UV range. The rising time and falling time of the transient response were 13 and 8 ms, respectively. A high photovoltaic responsivity up to 13.9 A/W and external quantum efficiency up to 479% were realized at the UV range. The specific detectivity D* = 1.44 × 1010 Jones was obtained at –1 V bias in ambient conditions. The spectral response was measured and the highest response was observed at the 360 nm band.
    $ {R_\lambda } = \frac{{{I_{\rm{ph}}}}}{{{P_\lambda }S}} , $ (1)

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    $ \rm{EQE} = \frac{{{N_C}}}{{{N_I}}} = \frac{{hc}}{{e\lambda }}R , $ (2)

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    $ {D^*} = \frac{{R\sqrt A }}{{\sqrt {2q{i_{\rm d}}} }} , $ (3)

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    Xuemin Zhang, Changling Yan, Jinghang Yang, Chao Pang, Yunzhen Yue, Chunhong Zeng, Baoshun Zhang. Vertical Schottky ultraviolet photodetector based on graphene and top–down fabricated GaN nanorod arrays[J]. Journal of Semiconductors, 2022, 43(6): 062804
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