Quantitative Analysis of Cu(In,Ga)Se2 Thin Films Deposited by Magnetron Sputtering Technology Using Laser-Induced Breakdown Spectroscopy

Lili Dong; Shiming Liu; Junshan Xiu

doi:10.3788/LOP57.233003

[1] Fan P, Chi J R, Liang G X et al. Fabrication of Cu(In, Ga)Se2 thin films by ion beam sputtering deposition from a quaternary target at different substrate temperatures[J]. Journal of Materials Science: Materials in Electronics, 23, 1957-1960(2012). http://link.springer.com/article/10.1007/s10854-012-0687-8

[2] Noufi R, Axton R, Herrington C et al. Electronic properties versus composition of thin films of CuInSe2[J]. Applied Physics Letters, 45, 668-670(1984).

[3] Jung S, Ahn S, Yun J H et al. Effects of Ga contents on properties of CIGS thin films and solar cells fabricated by co-evaporation technique[J]. Current Applied Physics, 10, 990-996(2010).

[4] Eisgruber I L, Joshi B, Gomez N et al. In situ X-ray fluorescence used for real-time control of CuInxGa1-xSe2 thin film composition[J]. Thin Solid Films, 408, 64-72(2002).

[5] Zhang H X, Hong R J. CIGS absorbing layers prepared by RF magnetron sputtering from a single quaternary target[J]. Ceramics International, 42, 14543-14547(2016).

[6] Bai T R, Liu C Q, Wang N et al. Effects of sputtering voltage and current on the composition and microstructure of the CIGS films prepared by one-step pulsed DC magnetron sputtering[J]. Journal of Alloys and Compounds, 646, 532-540(2015).

[7] Harmon R S. DeLucia F C, McManus C E, et al. Laser-induced breakdown spectroscopy - an emerging chemical sensor technology for real-time field-portable, geochemical, mineralogical, and environmental applications[J]. Applied Geochemistry, 21, 730-747(2006).

[8] de Giacomo A, Dell'Aglio M, de Pascale O et al. From single pulse to double pulse ns-laser induced breakdown spectroscopy under water: elemental analysis of aqueous solutions and submerged solid samples[J]. Spectrochimica Acta Part B: Atomic Spectroscopy, 62, 721-738(2007).

[9] Wang Z, Yuan T B, Hou Z Y et al. Laser-induced breakdown spectroscopy in China[J]. Frontiers of Physics, 9, 419-438(2014).

[10] Yu J, Zheng R E. Laser-induced plasma and laser-induced breakdown spectroscopy (LIBS) in China: the challenge and the opportunity[J]. Frontiers of Physics, 7, 647-648(2012). http://www.cqvip.com/QK/71009X/20126/44243513.html

[11] In J H, Kim C K, Lee S H et al. Rapid quantitative analysis of elemental composition and depth profile of Cu(In, Ga)Se2 thin solar cell film using laser-induced breakdown spectroscopy[J]. Thin Solid Films, 579, 89-94(2015).

[12] In J, Kim C, Lee S et al. Quantitative analysis of CuI n1-xGaxSe2 thin films with fluctuation of operational parameters using laser-induced breakdown spectroscopy[J]. Journal of Analytical Atomic Spectrometry, 28, 890-900(2013).

[13] Kim C K, In J H, Lee S H et al. Influence of laser wavelength on the laser induced breakdown spectroscopy measurement of thin CuIn1-xGaxSe2 solar cell films[J]. Spectrochimica Acta Part B: Atomic Spectroscopy, 88, 20-25(2013).

[14] In J, Kim C, Lee S et al. Reproducibility of CIGS thin film analysis by laser-induced breakdown spectroscopy[J]. Journal of Analytical Atomic Spectrometry, 28, 473-481(2013).

[15] Xiu J S, Liu S M, Wang K K et al. Analytical investigation of Cu(in, Ga)Se2 thin films using laser induced breakdown spectroscopy technology[J]. Chinese Journal of Lasers, 45, 1211002(2018).

[16] Liu S M, Xiu J S, Liu Y Y. Rapid quantitative analysis of element content ratios in Cu(in, Ga)Se2 thin films using laser-induced breakdown spectroscopy[J]. Chinese Journal of Lasers, 46, 0911001(2019).

[17] Xiu J S, Liu S M, Fu S G et al. Rapid qualitative and quantitative analysis of elemental composition of Cu(In,Ga)Se2 thin films using laser-induced breakdown spectroscopy[J]. Applied Optics, 58, 1040-1047(2019). http://www.researchgate.net/publication/330739210_Rapid_qualitative_and_quantitative_analysis_of_elemental_composition_of_CuIn_GaSe_2_thin_films_using_laser-induced_breakdown_spectroscopy