Lili Dong, Shiming Liu, Junshan Xiu. Quantitative Analysis of Cu(In,Ga)Se2 Thin Films Deposited by Magnetron Sputtering Technology Using Laser-Induced Breakdown Spectroscopy[J]. Laser & Optoelectronics Progress, 2020, 57(23): 233003
- Laser & Optoelectronics Progress
- Vol. 57, Issue 23, 233003 (2020)
Fig. 1. LIBS experimental setup for analyzing CIGS thin film
Fig. 2. LIBS spectrum of CIGS thin film
Fig. 3. Calibration curves of different sample sets. (a) Calibration curves of xGa/x(In+Ga); (b) calibration curves of xCu/x(In+Ga)
Fig. 4. Merged calibration curves. (a) Merged calibration curve of xGa/x(In+Ga); (b) merged calibration curve of xCu/x(In+Ga)
Fig. 5. EDS and LIBS results of CIGS thin film samples S1, S2 and S3 deposited at different sputtering parameters
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Table 1. EDS measured xGa/x(In+Ga) and xCu/x(In+Ga) in CIGS thin films obtained at different sputtering parameters
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Table 2. Parameters of calibration curves
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Table 3. Sputtering parameters of three CIGS thin film samples and relative errors between LIBS and EDS results
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