[1] Thomas I M. High laser damage threshold porous silica antireflective coating[J]. Applied Optics, 25, 1481-1483(1986).
[2] Belleville P F, Floch H G. Ammonia hardening of porous silica antireflective coatings[J]. Proceedings of SPIE, 2288, 25-32(1994).
[6] Belleville P, Bonnin C, Priotton J J. Room-temperature mirror preparation using sol-gel chemistry and laminar-flow coating technique[J]. Journal of Sol-Gel Science and Technology, 19, 223-226(2000).
[7] Xiong H. Moisture-resistant antireflective coatings for potassium dihydrogen phosphate(KDP) crystals[D]. Beijing: Graduate University of the Chinese Academy of Sciences(2010).
[8] Tang Y X, Zhang W Q, Zhou W P et al. Study of organic silicon resin protective coating with high laser damage threshold for KDP crystal[J]. Chinese Journal of Lasers, B3, 469-475(1994).
[9] Wang Y, Cai Y M, Teng L. Status and trends of cleaning technology for superpolished surfaces[J]. Aviation Precision Manufacturing Technology, 39, 1-4, 9(2003).
[10] Si H. Study on adhesive mechanism of contamination on fused silica surface and characterization method of cleanliness[D]. Harbin: Harbin Institute of Technology(2015).
[12] Luurtsema G A. Spin coating for rectangular substrates[D]. Berkeley: University of California(1997).
[13] Meyerhofer D. Characteristics of resist films produced by spinning[J]. Journal of Applied Physics, 49, 3993-3997(1978).
[14] Fan Z X, Shao J D, Yi K et al[M]. Optical thin films and applications, 379(2014).
[15] Guo Y J, Zu X T, Jiang X D et al. Laser-induced damage mechanism of the sol-gel single-layer SiO2 acid and base thin films[J]. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 266, 3190-3194(2008).
[16] Zhang Y L, Zhang X X, Ye H P et al. Design, preparation and modification of third-harmonic silica antireflective coatings with different thickness[J]. Chinese Journal of Inorganic Chemistry, 28, 119-124(2012).