Xin Zhang, Le Zhang, Chi Song, Lisong Yan, Xiaolin Yin, Binzhi Zhang. Study on surface roughness of monocrystalline silicon carbide based on PSD evaluation and pseudo-random tool path[J]. Infrared and Laser Engineering, 2023, 52(5): 20220838
- Infrared and Laser Engineering
- Vol. 52, Issue 5, 20220838 (2023)
Fig. 1. Deterministic tool path. (a) Grating tool path; (b) Helix tool path
Fig. 2. Diagram of a pseudo-random tool path
Fig. 3. Roughness test by Zygo newview 9000 white-light interferometry
Fig. 4. Measurement results of white-light interferometry before machining
Fig. 5. Measurement result of white-light interferometry after grating trajectory processing
Fig. 6. PSD curve calculated by data of grating trajectory
Fig. 7. Roughness result after processing with pseudo-random trajectory
Fig. 8. PSD curve calculated by data of pseudo-random trajectory
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