• Opto-Electronic Engineering
  • Vol. 50, Issue 3, 220041 (2023)
Rui Chen1, Jincheng Wang1, Wenzhuo Zhang1, Dongsheng Ji1..., Xinning Zhu1, Tao Luo1,2, Jing Wang1 and Wei Zhou1,*|Show fewer author(s)
Author Affiliations
  • 1Department of Mechanical & Electrical Engineering, Xiamen University, Xiamen, Fujian 361005, China
  • 2The State Key Laboratory of Fluid Power & Mechatronic Systems, Zhejiang University, Hangzhou, Zhejiang 310027, China
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    DOI: 10.12086/oee.2023.220041 Cite this Article
    Rui Chen, Jincheng Wang, Wenzhuo Zhang, Dongsheng Ji, Xinning Zhu, Tao Luo, Jing Wang, Wei Zhou. Research progress of laser manufacturing technology for microstructure sensor[J]. Opto-Electronic Engineering, 2023, 50(3): 220041 Copy Citation Text show less
    References

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    [77] Kazemzadeh R, Kim W S. Flexible temperature sensor with laser scribed Graphene oxide[C]//14th IEEE International Conference on Nanotechnology, 2014: 420–423.

    [88] Mania G K, Ponnusamy D, Tsuchiya K. Ultrafast fabrication of microneedle array for transdermal Ion detection[C]//2018 International Symposium on Micro-NanoMechatronics and Human Science (MHS), 2018: 1–3.

    Rui Chen, Jincheng Wang, Wenzhuo Zhang, Dongsheng Ji, Xinning Zhu, Tao Luo, Jing Wang, Wei Zhou. Research progress of laser manufacturing technology for microstructure sensor[J]. Opto-Electronic Engineering, 2023, 50(3): 220041
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