• Opto-Electronic Engineering
  • Vol. 50, Issue 3, 220041 (2023)
Rui Chen1, Jincheng Wang1, Wenzhuo Zhang1, Dongsheng Ji1, Xinning Zhu1, Tao Luo1、2, Jing Wang1, and Wei Zhou1、*
Author Affiliations
  • 1Department of Mechanical & Electrical Engineering, Xiamen University, Xiamen, Fujian 361005, China
  • 2The State Key Laboratory of Fluid Power & Mechatronic Systems, Zhejiang University, Hangzhou, Zhejiang 310027, China
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    DOI: 10.12086/oee.2023.220041 Cite this Article
    Rui Chen, Jincheng Wang, Wenzhuo Zhang, Dongsheng Ji, Xinning Zhu, Tao Luo, Jing Wang, Wei Zhou. Research progress of laser manufacturing technology for microstructure sensor[J]. Opto-Electronic Engineering, 2023, 50(3): 220041 Copy Citation Text show less

    Abstract

    Microstructure sensor is a sensor device with the micro-scale structure as a sensitive unit and can convert external physical, chemical, and biological signals into electrical signals. It has been widely used in intelligent robots, health monitoring, virtual electronics, and other fields. At present, the manufacturing methods of microstructure sensors mainly include laser manufacturing technology, MEMS technology, and 3D printing technology. Laser manufacturing technology is a green processing method that focuses the high-energy laser beam on the object to be processed and makes the laser interact with the material, mainly including laser ablation, laser direct writing, laser induction, and laser-template composite processing. It has the advantages of non-contact processing, no mask, and customizable manufacturing. By optimizing the parameters of the laser manufacturing process, it can realize the efficient and low-cost manufacturing of microstructures with different sizes and shapes. In this paper, the types, function, and manufacturing technology of the microstructures are summarized. At the same time, the microstructure sensors fabricated by laser manufacturing technology are summarized and classified, and the manufacturing technology and application of bioelectric sensors, temperature sensors and pressure sensors are analyzed in detail. Finally, the development trends of the laser manufacturing technology for microstructure sensors are summarized and prospected.
    Rui Chen, Jincheng Wang, Wenzhuo Zhang, Dongsheng Ji, Xinning Zhu, Tao Luo, Jing Wang, Wei Zhou. Research progress of laser manufacturing technology for microstructure sensor[J]. Opto-Electronic Engineering, 2023, 50(3): 220041
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