• Opto-Electronic Engineering
  • Vol. 50, Issue 3, 220041 (2023)
Rui Chen1, Jincheng Wang1, Wenzhuo Zhang1, Dongsheng Ji1..., Xinning Zhu1, Tao Luo1,2, Jing Wang1 and Wei Zhou1,*|Show fewer author(s)
Author Affiliations
  • 1Department of Mechanical & Electrical Engineering, Xiamen University, Xiamen, Fujian 361005, China
  • 2The State Key Laboratory of Fluid Power & Mechatronic Systems, Zhejiang University, Hangzhou, Zhejiang 310027, China
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    DOI: 10.12086/oee.2023.220041 Cite this Article
    Rui Chen, Jincheng Wang, Wenzhuo Zhang, Dongsheng Ji, Xinning Zhu, Tao Luo, Jing Wang, Wei Zhou. Research progress of laser manufacturing technology for microstructure sensor[J]. Opto-Electronic Engineering, 2023, 50(3): 220041 Copy Citation Text show less
    Application of the microstructure sensor for bioelectricity, pressure and temperature detection
    Fig. 1. Application of the microstructure sensor for bioelectricity, pressure and temperature detection
    Classification of microstructures
    Fig. 2. Classification of microstructures
    Laser manufacturing method of microstructure
    Fig. 3. Laser manufacturing method of microstructure
    Laser manufacturing pressure sensor. (a) Image of the sensor and microstructure super-depth maps, response time testing, speech recognition applications[66]; (b) SEM images of three microstructures and performance test of sensors[67]; (c) Schematic diagram of microstructure sensor, SEM image, sensitivity and pulse performance test[71]; (d) Schematic diagram of sensor microstructure and SEM image[72]
    Fig. 4. Laser manufacturing pressure sensor. (a) Image of the sensor and microstructure super-depth maps, response time testing, speech recognition applications[66]; (b) SEM images of three microstructures and performance test of sensors[67]; (c) Schematic diagram of microstructure sensor, SEM image, sensitivity and pulse performance test[71]; (d) Schematic diagram of sensor microstructure and SEM image[72]
    Temperature sensor based on the laser reduction of graphene oxide. (a) Image of the sensor, SEM image of the reduced graphene oxide, sensitivity, bending test hysteresis test, blowing and breathing performance test and curved surface test of the sensor[51]; (b) Laser reduced graphene oxide sensor diagram[76]; (c) Reduction of graphene oxide by laser[77]; (d) Sensor manfacturing process[78]
    Fig. 5. Temperature sensor based on the laser reduction of graphene oxide. (a) Image of the sensor, SEM image of the reduced graphene oxide, sensitivity, bending test hysteresis test, blowing and breathing performance test and curved surface test of the sensor[51]; (b) Laser reduced graphene oxide sensor diagram[76]; (c) Reduction of graphene oxide by laser[77]; (d) Sensor manfacturing process[78]
    Temperature sensor based on the laser-induced graphene. (a) TEM image of the typical layered morphology of NMP-passivated BP nanosheet and Photograph illustrating location of sensor for jugular vein pulse measurement[81]; (b) Device photograph and SEM images of cross-sectional view of the ZIS nanosheets on porous graphene electrodes[82]; (c) Photograph of the 3 × 3 sensor and response curves for temperature monitoring[83]; (d) Leaf surface induced graphene patterning for temperature sensors[84]
    Fig. 6. Temperature sensor based on the laser-induced graphene. (a) TEM image of the typical layered morphology of NMP-passivated BP nanosheet and Photograph illustrating location of sensor for jugular vein pulse measurement[81]; (b) Device photograph and SEM images of cross-sectional view of the ZIS nanosheets on porous graphene electrodes[82]; (c) Photograph of the 3 × 3 sensor and response curves for temperature monitoring[83]; (d) Leaf surface induced graphene patterning for temperature sensors[84]
    Microneedle Array Bioelectric Sensors. (a) SEM image of an array of microneedles on the sensor and top views of the microneedle sensor equipped with an adhesive film[87]; (b) Scanning electron microscope image of the PDMS microneedle before Au deposition[88]; (c) Dry electrode manufacturing process and SEM image of microneedle array[36, 89]; (d) Electrode optical image[91]; (e) Photograph of the sensor and SEM image of the microneedle[92]
    Fig. 7. Microneedle Array Bioelectric Sensors. (a) SEM image of an array of microneedles on the sensor and top views of the microneedle sensor equipped with an adhesive film[87]; (b) Scanning electron microscope image of the PDMS microneedle before Au deposition[88]; (c) Dry electrode manufacturing process and SEM image of microneedle array[36, 89]; (d) Electrode optical image[91]; (e) Photograph of the sensor and SEM image of the microneedle[92]
    文献最大灵敏度/kPa−1量程/kPa响应时间/ms循环加载/次微结构类型制造工艺
    [65]8.320060/7010000微球激光-倒模复合加工
    [62]5.42580微锥激光-倒模复合加工
    [61]15.420015/207500微球激光-倒模复合加工
    [66]1.828036/526000微球激光直写
    [70]11.06351000两级微球激光直写
    [71]4.48657/71000微柱激光直写
    [72]48012000/30004000微孔激光诱导
    Table 1. Performance comparison of laser-manufactured pressure sensors
    文献灵敏度范围/℃响应时间微结构类型制造工艺
    [50]0.37% ℃−130~1000.196 s/9.7 s微孔激光诱导(rGO)
    [75]0.08% ℃−125~75微孔激光诱导(rGO)
    [77]0.52% ℃−115~170微孔激光诱导(rGO)
    [79]0.174% ℃−125~50微孔激光诱导(LIG)
    [80]9.84 Ω/℃18~54微孔激光诱导(LIG)
    [81]20~80106 ms/281 ms微孔激光诱导(LIG)
    [82]0.08% ℃−125~507.0 s/6.2 s微孔激光诱导(LIG)
    Table 2. Performance comparison of laser-manufactured temperature sensors
    Rui Chen, Jincheng Wang, Wenzhuo Zhang, Dongsheng Ji, Xinning Zhu, Tao Luo, Jing Wang, Wei Zhou. Research progress of laser manufacturing technology for microstructure sensor[J]. Opto-Electronic Engineering, 2023, 50(3): 220041
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