• Laser & Optoelectronics Progress
  • Vol. 54, Issue 5, 50001 (2017)
Zheng Xiu1、2、* and Liu Yong1、2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/lop54.050001 Cite this Article Set citation alerts
    Zheng Xiu, Liu Yong. Large-Scale Photonic Integration Technologies Based on Multi-Project Wafer Flow Sheet[J]. Laser & Optoelectronics Progress, 2017, 54(5): 50001 Copy Citation Text show less

    Abstract

    With the rapid growth of communication capacity of optical networks, integrating discrete optical devices into a single chip to reduce footprint and cost becomes a development of optoelectronic devices. Photonic integrated circuit has many advantages such as small footprint, low power consumption and light weight, and it is a key technology for future broad-bandwidth optical networks to solve the problems of large energy consumption, large volume and small capacity. We review three kinds of large-scale photonic integration technologies which are based on multi-project wafer flow sheets, including silicon-based photonic integration technology, Ⅲ-Ⅴ indium phosphide integration technology and TriPleX integration technology which consists of multilayer waveguides of silicon nitride and silicon oxide. Three foundries supporting multi-project wafer sheet photonic integration technologies are introduced, and some chip examples realized by these foundries are presented. The comparison of technology parameters among different foundries is carried out.
    Zheng Xiu, Liu Yong. Large-Scale Photonic Integration Technologies Based on Multi-Project Wafer Flow Sheet[J]. Laser & Optoelectronics Progress, 2017, 54(5): 50001
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