• Photonics Research
  • Vol. 10, Issue 6, 1484 (2022)
Shangsen Sun1、†, Zhiqiang Yang2、†, Juanli Wang1, Runsen Zhang1, Fengchun Zhang1, Ning Zhu1、5、*, Lei Wan3、6、*, and Zhaohui Li2、4、7、*
Author Affiliations
  • 1Institute of Semiconductor Science and Technology, Guangdong Engineering Technology Research Center of Low Carbon and New Energy Materials, South China Normal University, Guangzhou 510631, China
  • 2Guangdong Provincial Key Laboratory of Optoelectronic Information Processing Chips and Systems, Key Laboratory of Optoelectronic Materials and Technologies, School of Electrical and Information Technology, Sun Yat-sen University, Guangzhou 510275, China
  • 3Department of Electronic Engineering, College of Information Science and Technology, Jinan University, Guangzhou 510632, China
  • 4Southern Marine Science and Engineering Guangdong Laboratory (Zhuhai), Zhuhai 519000, China
  • 5e-mail: zhuning@scnu.edu.cn
  • 6e-mail: wanlei@jnu.edu.cn
  • 7e-mail: lzhh88@sysu.edu.cn
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    DOI: 10.1364/PRJ.445529 Cite this Article Set citation alerts
    Shangsen Sun, Zhiqiang Yang, Juanli Wang, Runsen Zhang, Fengchun Zhang, Ning Zhu, Lei Wan, Zhaohui Li. Ultra-sharp silicon multimode waveguide bends based on double free-form curves[J]. Photonics Research, 2022, 10(6): 1484 Copy Citation Text show less

    Abstract

    Mode-division multiplexing (MDM) can greatly improve the capacity of information transmission. The multimode waveguide bend (MWB) with small size and high performance is of great significance for the on-chip MDM integrated system. In this paper, an MWB with high performance based on double free-form curves (DFFCs) is proposed and realized. The DFFC is a combination of a series of arcs optimized by the inverse design method. The fabrication of this MWB only needs one-step lithography and plasma etching and has a large fabrication tolerance. MWBs with effective radii of 6 μm and 10 μm are designed to support three modes and four modes, respectively. The proposed method gives the best overall performance considering both the effective bending radius and the transmission efficiency. The fabricated MWB with four mode channels has low excess losses and crosstalks below -21 dB in the wavelength range from 1520 to 1580 nm. It is expected that this design can play an important role in promoting the dense integration of multimode transmission systems.
    FOM=11n(1α)In(1Ti)1nαInXi.

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    Ri=RMAX[1randim]1iD.

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    Shangsen Sun, Zhiqiang Yang, Juanli Wang, Runsen Zhang, Fengchun Zhang, Ning Zhu, Lei Wan, Zhaohui Li. Ultra-sharp silicon multimode waveguide bends based on double free-form curves[J]. Photonics Research, 2022, 10(6): 1484
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