Ultra-sharp silicon multimode waveguide bends based on double free-form curves

Shangsen Sun; Zhiqiang Yang; Juanli Wang; Runsen Zhang; Fengchun Zhang; Ning Zhu; Lei Wan; Zhaohui Li

doi:10.1364/PRJ.445529

Journals >Photonics Research >Volume 10 >Issue 6 >Page 1484 > Article

Photonics Research
Vol. 10, Issue 6, 1484 (2022)

Ultra-sharp silicon multimode waveguide bends based on double free-form curves

Shangsen Sun^1、†, Zhiqiang Yang^2、†, Juanli Wang¹, Runsen Zhang¹, Fengchun Zhang¹, Ning Zhu^1、5、*, Lei Wan^3、6、*, and Zhaohui Li^{2、4、7、*}

Author Affiliations

¹Institute of Semiconductor Science and Technology, Guangdong Engineering Technology Research Center of Low Carbon and New Energy Materials, South China Normal University, Guangzhou 510631, China

²Guangdong Provincial Key Laboratory of Optoelectronic Information Processing Chips and Systems, Key Laboratory of Optoelectronic Materials and Technologies, School of Electrical and Information Technology, Sun Yat-sen University, Guangzhou 510275, China

³Department of Electronic Engineering, College of Information Science and Technology, Jinan University, Guangzhou 510632, China

⁴Southern Marine Science and Engineering Guangdong Laboratory (Zhuhai), Zhuhai 519000, China

⁵e-mail: zhuning@scnu.edu.cn

⁶e-mail: wanlei@jnu.edu.cn

⁷e-mail: lzhh88@sysu.edu.cn

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DOI: 10.1364/PRJ.445529 Cite this Article Set citation alerts

Shangsen Sun, Zhiqiang Yang, Juanli Wang, Runsen Zhang, Fengchun Zhang, Ning Zhu, Lei Wan, Zhaohui Li. Ultra-sharp silicon multimode waveguide bends based on double free-form curves[J]. Photonics Research, 2022, 10(6): 1484 Copy Citation Text

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