Shi Meng, Shijie Liu, Lei Chen, You Zhou, Yunbo Bai. Simulation and Experimental Study of Absolute Measurement Method for Optical Surface[J]. Laser & Optoelectronics Progress, 2018, 55(5): 051201
- Laser & Optoelectronics Progress
- Vol. 55, Issue 5, 051201 (2018)
Fig. 1. Measurement principle of N bit rotation average detection method
Fig. 2. Measurement principle of oblique incidence iteration absolute detection method
Fig. 3. Initial surfaces used in simulation experiment. (a) A; (b) B; (c) C
Fig. 4. Simulation results obtained by N bit rotation average method. (a) A; (b) B; (c) C
Fig. 5. Residual data between the wavefront recovered by N bit rotation average method and original wavefront. (a) A; (b) B; (c) C
Fig. 6. Simulation results obtained by oblique incidence iteration absolute detection method. (a) K; (b) M; (c) L
Fig. 7. Residual data between the wavefront recovered by oblique incidence iteration absolute detection method and original wavefront. (a) K; (b) M; (c) L
Fig. 8. Simulation results obtained by oblique incidence odd oven function absolute detection method. (a) K; (b) M; (c) L
Fig. 9. Residual data between the wavefront recovered by oblique incidence odd oven function absolute detection method and original wavefront. (a) K; (b) M; (c) L
Fig. 10. Experimental setup for N bit rotation absolute detection
Fig. 11. Surface result of standard mirror A obtained by N bit rotation average method
Fig. 12. Experimental setup for oblique incidence absolute detection
Fig. 13. Surface results of L obtained by different methods. (a) Iteration method; (b) odd oven function method
Fig. 14. Relative surface measurement result of standard mirror A
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Table 1. PV and RMS data of the initial surfaces
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Table 2. PV and RMS data of the recovered surfaces obtained by N bit rotation average method
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Table 3. PV and RMS data of the recovered surfaces obtained by oblique incidence iteration absolute detection method
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Table 4. PV and RMS data of the recovered surfaces obtained by oblique incidence odd oven function absolute detection method
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Table 5. PV and RMS data of the surface of standard mirror A obtained by different methods
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