• Laser & Optoelectronics Progress
  • Vol. 55, Issue 5, 051201 (2018)
Shi Meng1、2、1; 2; , Shijie Liu1、2; , Lei Chen1、1; , You Zhou1、2; , and Yunbo Bai1、2;
Author Affiliations
  • 1 Key Laboratory of High Laser Materials, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 1 School of Electronic Engineering and Optoelectronic Technology, Nanjing University of Science and Technology, Nanjing, Jiangsu 210094, China
  • 2 Key Laboratory of High Laser Materials, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
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    DOI: 10.3788/LOP55.051201 Cite this Article Set citation alerts
    Shi Meng, Shijie Liu, Lei Chen, You Zhou, Yunbo Bai. Simulation and Experimental Study of Absolute Measurement Method for Optical Surface[J]. Laser & Optoelectronics Progress, 2018, 55(5): 051201 Copy Citation Text show less

    Abstract

    The traditional optical interference measurement method is relative detection method, and the detection accuracy is generally limited by the accuracy of the reference surface shape. The use of absolute detection technology can eliminate the constraint of the reference surface shape error on the interference measurement accuracy, which can realize the measurement of the surface shape in nanoscale. Firstly, N bit rotation average absolute detection method and oblique incidence absolute detection method are introduced. Then the theoretical derivation and simulation analysis of two detection methods and three algorithms (rotation average algorithm, iteration algorithm, odd even function algorithm) used in the process of surface restoration are carried out. Finally, the recovered surface shape accuracy and feasibility of the three methods are verified by the experiments. The advantage, disadvantage and applicability of each method are analyzed and compared. At last, the absolute surface measurement of mirror with aperture of 100 mm for high precision interferometer standard flat with peak valley (PV) value of nearly λ/40 is achieved.
    Shi Meng, Shijie Liu, Lei Chen, You Zhou, Yunbo Bai. Simulation and Experimental Study of Absolute Measurement Method for Optical Surface[J]. Laser & Optoelectronics Progress, 2018, 55(5): 051201
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