Xin Guo, Jinbin Ding, Yi Zhou, Yu Wang. Ablation effects and mechanism of sintered silicon carbide ceramics by an ArF excimer laser[J]. Chinese Optics Letters, 2018, 16(9): 091402
- Chinese Optics Letters
- Vol. 16, Issue 9, 091402 (2018)
Fig. 1. Morphology of ablated SiC ceramics at 3.1 J / cm 2
Fig. 2. (a) Morphology of the matrix and (b) the ablation zone at 3.1 J / cm 2
Fig. 3. (a) Morphology and (b) composition of the ablated SiC ceramics at 3.1 J / cm 2
Fig. 4. Phases of the SiC zones at 3.1 J / cm 2
Fig. 5. Morphology of the SiC with laser fluence of (a) 1.5 J / cm 2 4 J / cm 2
Fig. 6. (a) Ablation depth and (b) oxidation length.
Fig. 7. Ablation efficiency and ablation depth.
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