Ablation effects and mechanism of sintered silicon carbide ceramics by an ArF excimer laser

Xin Guo; Jinbin Ding; Yi Zhou; Yu Wang

doi:10.3788/COL201816.091402

Journals >Chinese Optics Letters >Volume 16 >Issue 9 >Page 091402 > Article

Chinese Optics Letters
Vol. 16, Issue 9, 091402 (2018)

Ablation effects and mechanism of sintered silicon carbide ceramics by an ArF excimer laser

Xin Guo^*, Jinbin Ding, Yi Zhou, and Yu Wang

Author Affiliations

Academy of Opto-Electronics, Chinese Academy of Sciences, Beijing 100094, China

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DOI: 10.3788/COL201816.091402 Cite this Article Set citation alerts

Xin Guo, Jinbin Ding, Yi Zhou, Yu Wang. Ablation effects and mechanism of sintered silicon carbide ceramics by an ArF excimer laser[J]. Chinese Optics Letters, 2018, 16(9): 091402 Copy Citation Text

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Xin Guo, Jinbin Ding, Yi Zhou, Yu Wang. Ablation effects and mechanism of sintered silicon carbide ceramics by an ArF excimer laser[J]. Chinese Optics Letters, 2018, 16(9): 091402

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