Application of Femtosecond Laser Irradiation and Wet Etching in Fabrication of Microstructures in Crystal Materials

Tianlun Shen; Jinhai Si; Tao Chen; Xun Hou

doi:10.3788/LOP57.111419

Journals >Laser & Optoelectronics Progress >Volume 57 >Issue 11 >Page 111419 > Article

Laser & Optoelectronics Progress
Vol. 57, Issue 11, 111419 (2020)

Application of Femtosecond Laser Irradiation and Wet Etching in Fabrication of Microstructures in Crystal Materials

Tianlun Shen, Jinhai Si^*, Tao Chen^**, and Xun Hou

Author Affiliations

Shaanxi Key Laboratory of Information Photonics Technology, School of Electronic Science and Engineering, Faculty of Electronic and Information Science, Xi'an Jiaotong University, Xi'an, Shaanxi 710049, China

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DOI: 10.3788/LOP57.111419 Cite this Article Set citation alerts

Tianlun Shen, Jinhai Si, Tao Chen, Xun Hou. Application of Femtosecond Laser Irradiation and Wet Etching in Fabrication of Microstructures in Crystal Materials[J]. Laser & Optoelectronics Progress, 2020, 57(11): 111419 Copy Citation Text

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