• Photonics Research
  • Vol. 12, Issue 1, 115 (2024)
Jianing Wang1、2, Xi Wang1、2, Yihang Li1、2, Yanfu Yang2, Qinghai Song1、3, and Ke Xu1、2、*
Author Affiliations
  • 1Guangdong Provincial Key Laboratory of Semiconductor Optoelectronic Materials and Intelligent Photonic Systems, Harbin Institute of Technology, Shenzhen 518055, China
  • 2Department of Electronic & Information Engineering, Harbin Institute of Technology, Shenzhen 518055, China
  • 3Department of Science, Harbin Institute of Technology, Shenzhen 518055, China
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    DOI: 10.1364/PRJ.508024 Cite this Article Set citation alerts
    Jianing Wang, Xi Wang, Yihang Li, Yanfu Yang, Qinghai Song, Ke Xu. High-responsivity on-chip waveguide coupled germanium photodetector for 2 μm waveband[J]. Photonics Research, 2024, 12(1): 115 Copy Citation Text show less

    Abstract

    Recently, the emerging 2 μm waveband has gained increasing interest due to its great potential for a wide scope of applications. Compared with the existing optical communication windows at shorter wavelengths, it also offers distinct advantages of lower nonlinear absorption, better fabrication tolerance, and larger free carrier plasma effects for silicon photonics, which has been a proven device technology. While much progress has been witnessed for silicon photonics at the 2 μm waveband, the primary challenge still exists for on-chip detectors. Despite the maturity and compatibility of the waveguide coupled photodetectors made of germanium, the 2 μm regime is far beyond its cutoff wavelength. In this work, we demonstrate an efficient and high-speed on-chip waveguide-coupled germanium photodetector operating at the 2 μm waveband. The weak sub-bandgap absorption of epitaxial germanium is greatly enhanced by a lateral separation absorption charge multiplication structure. The detector is fabricated by the standard process offered by a commercial foundry. The device has a benchmark performance with responsivity of 1.05 A/W and 3 dB bandwidth of 7.12 GHz, which is able to receive high-speed signals with up to 20 Gbit/s data rate. The availability of such an efficient and fast on-chip detector circumvents the barriers between silicon photonic integrated circuits and the potential applications at the 2 μm waveband.
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    Jianing Wang, Xi Wang, Yihang Li, Yanfu Yang, Qinghai Song, Ke Xu. High-responsivity on-chip waveguide coupled germanium photodetector for 2 μm waveband[J]. Photonics Research, 2024, 12(1): 115
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