• Journal of Semiconductors
  • Vol. 43, Issue 6, 063101 (2022)
Ye Yuan1, Shengqiang Zhou2, and Xinqiang Wang1、3
Author Affiliations
  • 1Songshan Lake Materials Laboratory, Dongguan 523808, China
  • 2Institute of Ion Beam Physics and Material Research, Helmholtz-Zentrum Dresden-Rossendorf, Dresden 01328, Germany
  • 3Dongguan Institute of Optoelectronics, Peking University, Dongguan 523808, China
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    DOI: 10.1088/1674-4926/43/6/063101 Cite this Article
    Ye Yuan, Shengqiang Zhou, Xinqiang Wang. Modulating properties by light ion irradiation: From novel functional materials to semiconductor power devices[J]. Journal of Semiconductors, 2022, 43(6): 063101 Copy Citation Text show less
    (Color online) Schematic of the cross-section for electronic and nuclear stopping processes as a function of ion energy[12].
    Fig. 1. (Color online) Schematic of the cross-section for electronic and nuclear stopping processes as a function of ion energy[12].
    (Color online) Magnetic properties after introducing hole compensation by ion irradiation. The ion fluence was increased in linear steps. (a), (c), and (d) show the temperature dependent magnetization for different samples, while (b) shows the magnetic hysteresis for sample Mn6ann (GaMnAs) for various ion fluences. The temperature-dependent magnetization is measured at a small field of 20 Oe after cooling in field. One observes an increase in the coercive field HC when TC and the remanent magnetization decrease. The arrows indicate the increase of DPA from 0 to 2.88 × 10−3. In each panel, the black line is the result for the nonirradiated sample. This figure is drawn from Ref. [16].
    Fig. 2. (Color online) Magnetic properties after introducing hole compensation by ion irradiation. The ion fluence was increased in linear steps. (a), (c), and (d) show the temperature dependent magnetization for different samples, while (b) shows the magnetic hysteresis for sample Mn6ann (GaMnAs) for various ion fluences. The temperature-dependent magnetization is measured at a small field of 20 Oe after cooling in field. One observes an increase in the coercive field HC when TC and the remanent magnetization decrease. The arrows indicate the increase of DPA from 0 to 2.88 × 10−3. In each panel, the black line is the result for the nonirradiated sample. This figure is drawn from Ref. [16].
    (Color online) (a) Curie temperature (TC), (b) saturation magnetization (MS) as well as (c) coercive field (HC) for the magnetic easy axis at 5 K versus DPA for (Ga,Mn)As (squares), (In,Mn)As (circles) and (Ga,Mn)P (triangles)[17].
    Fig. 3. (Color online) (a) Curie temperature (TC), (b) saturation magnetization (MS) as well as (c) coercive field (HC) for the magnetic easy axis at 5 K versus DPA for (Ga,Mn)As (squares), (In,Mn)As (circles) and (Ga,Mn)P (triangles)[17].
    (Color online) (a) Oscillating part of the resistivity ∆ρxx at 1.9 K for B∥c as a function of the inverse magnetic field 1/B for different irradiation doses. (b) Temperature dependence of the oscillation amplitude with solid lines representing the fits obtained using the equation of Eq. (2). Different symbols correspond to the analysis of different Landau levels (i.e., peaks at different 1/B positions). To compare the temperature dependence of different peaks, the oscillation amplitudes have been normalized to the value of the fit for 1/B → 0. (c) Cyclotron masses mc as function of the inverse oscillation period [∆(1/B)]–1. (d) Dingle plots at T = 1.9 K and inset showing the mean free path l as a function of irradiation doseQ[18].
    Fig. 4. (Color online) (a) Oscillating part of the resistivity ρxx at 1.9 K for Bc as a function of the inverse magnetic field 1/B for different irradiation doses. (b) Temperature dependence of the oscillation amplitude with solid lines representing the fits obtained using the equation of Eq. (2). Different symbols correspond to the analysis of different Landau levels (i.e., peaks at different 1/B positions). To compare the temperature dependence of different peaks, the oscillation amplitudes have been normalized to the value of the fit for 1/B → 0. (c) Cyclotron masses mc as function of the inverse oscillation period [∆(1/B)]–1. (d) Dingle plots at T = 1.9 K and inset showing the mean free path l as a function of irradiation doseQ[18].
    (Color online) Low-temperature variation of the London penetration depth Δλ(T) in a single crystal of NbxBi2Se3 for multiple values of cumulative irradiation dose vs reduced temperature squared (T/TC)2. The linear fits (red, black lines) indicate quadratic behavior. As the dose increases, the temperature dependence remains quadratic, indicative of point nodes in the superconducting gap. Data are offset vertically for clarity of presentation. The top axis shows the corresponding T/TC values[39].
    Fig. 5. (Color online) Low-temperature variation of the London penetration depth Δλ(T) in a single crystal of NbxBi2Se3 for multiple values of cumulative irradiation dose vs reduced temperature squared (T/TC)2. The linear fits (red, black lines) indicate quadratic behavior. As the dose increases, the temperature dependence remains quadratic, indicative of point nodes in the superconducting gap. Data are offset vertically for clarity of presentation. The top axis shows the corresponding T/TC values[39].
    (Color online) DLTS spectra of 4H-SiC n-type epilayer irradiated with (a) fast neutrons, (b) 4.5 MeV electrons, (c) 670 keV protons, and (d) 9.6 MeV carbon ions. First temperature scan, rate window 4.1 s−1 (neutron, proton and carbon irradiation) and 56 s−1 (electrons)[44].
    Fig. 6. (Color online) DLTS spectra of 4H-SiC n-type epilayer irradiated with (a) fast neutrons, (b) 4.5 MeV electrons, (c) 670 keV protons, and (d) 9.6 MeV carbon ions. First temperature scan, rate window 4.1 s−1 (neutron, proton and carbon irradiation) and 56 s−1 (electrons)[44].
    (Color online) DLTS spectra of n-base of the 4H-SiC PiN diode measured before (black thin) and after (short-dashed) irradiation with 800 keV protons to a fluence of 5 × 109 cm–2 and after annealing at 370 °C (red thick)[59].
    Fig. 7. (Color online) DLTS spectra of n-base of the 4H-SiC PiN diode measured before (black thin) and after (short-dashed) irradiation with 800 keV protons to a fluence of 5 × 109 cm–2 and after annealing at 370 °C (red thick)[59].
    (Color online) Reverse recovery of the 2 A/10 keV SiC PiN diode measured before (solid line) and after irradiation (dashed-dotted line) with 800 keV protons to a fluence of 1 × 1011 cm–1 and after subsequent 1 h annealing at 370 °C (dash line) [20].
    Fig. 8. (Color online) Reverse recovery of the 2 A/10 keV SiC PiN diode measured before (solid line) and after irradiation (dashed-dotted line) with 800 keV protons to a fluence of 1 × 1011 cm–1 and after subsequent 1 h annealing at 370 °C (dash line) [20].
    (Color online) Measured OCVD response of 4H-SiC PiN diodes irradiated with different fluences of 800 keV protons. The value of high-level lifetime τHL (extracted at t = 3 µs) for different irradiation fluences are shown in the inset[59].
    Fig. 9. (Color online) Measured OCVD response of 4H-SiC PiN diodes irradiated with different fluences of 800 keV protons. The value of high-level lifetime τHL (extracted at t = 3 µs) for different irradiation fluences are shown in the inset[59].
    (Color online) Majority carrier DLTS spectra of P+PN–N+ diode measured after (a) He+ irradiation and (b) H+ and isochronal 40 min annealing at 220 and 350 °C, rate window 260 s–1 [69].
    Fig. 10. (Color online) Majority carrier DLTS spectra of P+PNN+ diode measured after (a) He+ irradiation and (b) H+ and isochronal 40 min annealing at 220 and 350 °C, rate window 260 s–1 [69].
    (a) Current reverse recovery characteristics of diodes irradiated by 500 keV (3 × 1014 cm–2) and 4 MeV (2 × 1013 cm–2) electrons (solid thin) and H+/He2+ ions (fluence 5 × 1012 / 5 × 1011 cm–2, thick solid/dashed); (b) current (solid) and voltage (dashed) reverse recovery characteristics of the unirradiated diode and diodes irradiated by 4 MeV (2 × 1013 cm–2) electrons and H+ ions (fluence 5 × 1012 cm–2)[73].
    Fig. 11. (a) Current reverse recovery characteristics of diodes irradiated by 500 keV (3 × 1014 cm–2) and 4 MeV (2 × 1013 cm–2) electrons (solid thin) and H+/He2+ ions (fluence 5 × 1012 / 5 × 1011 cm–2, thick solid/dashed); (b) current (solid) and voltage (dashed) reverse recovery characteristics of the unirradiated diode and diodes irradiated by 4 MeV (2 × 1013 cm–2) electrons and H+ ions (fluence 5 × 1012 cm–2)[73].
    The reverse I–V curves measured at 30 °C of the unirradiated and not annealed device (Untreated), the irradiated double Al electrode devices with He energy of 11 MeV and dose of 1 × 1010 cm−2 (He irradiation), and the PtSi + Al electrode devices with He energy of 10 MeV and doses of 1 × 1012 and 1 × 1013 cm−2, both annealed at 700 °C for 20 min (Pt gettering)[76].
    Fig. 12. The reverse I–V curves measured at 30 °C of the unirradiated and not annealed device (Untreated), the irradiated double Al electrode devices with He energy of 11 MeV and dose of 1 × 1010 cm−2 (He irradiation), and the PtSi + Al electrode devices with He energy of 10 MeV and doses of 1 × 1012 and 1 × 1013 cm−2, both annealed at 700 °C for 20 min (Pt gettering)[76].
    Trade-off between the ON-state voltage drop at 100 A and the turn-OFF losses measured at (a) VDC = 500 V, JF = 1 A/cm2 and (b) JF = 50 A/cm2 for unirradiated and helium irradiated devices whose electrodes are PtSi and Al. The irradiation energies are 5.8 MeV (open squares) and 10 MeV (open circles) for the sample with PtSi anode and 7.1 MeV (solid squares) and 11 MeV (solid circles) for the sample with Al anode[75].
    Fig. 13. Trade-off between the ON-state voltage drop at 100 A and the turn-OFF losses measured at (a) VDC = 500 V, JF = 1 A/cm2 and (b) JF = 50 A/cm2 for unirradiated and helium irradiated devices whose electrodes are PtSi and Al. The irradiation energies are 5.8 MeV (open squares) and 10 MeV (open circles) for the sample with PtSi anode and 7.1 MeV (solid squares) and 11 MeV (solid circles) for the sample with Al anode[75].
    LevelEnergy (eV)Ref.
    T1EC– 0.17 [20, 60]
    EH1EC – 0.42 [20, 59, 61, 62]
    Z1/2EC – 0.66 [20, 43, 50, 57, 59, 63]
    EH3EC – 0.72 [20, 44, 59, 62]
    EH5EC – 0.80 [49]
    T2EC – 1.41 [60]
    EH6/7EC– 1.64 [49, 64]
    Table 1. Parameters for proton irradiation induced deep levels in n-type SiC.
    LevelBandgap position (eV)Capture cross section (cm2) Identity
    E1EC – 0.167 σn = 4 × 10–15VO(–/0)+Ci–Cs(–/0)
    E2EC – 0.213 σn = 1 × 10–14? (H-related)
    E3EC – 0.252 σn = 7 × 10–15V2=/–
    E4EC – 0.312 σn = 4 × 10–15VO–H
    E5EC – 0.436 σn = 3 × 10–15V2–/0
    E6EC – 0.463 σn = 2 × 10–16H-related (V2H)
    E7EC – 0.507 σn = 6 × 10–17? (H-related)
    Table 2. Survey of deep level electron traps identified in proton and He irradiated silicon[69, 72].
    Ye Yuan, Shengqiang Zhou, Xinqiang Wang. Modulating properties by light ion irradiation: From novel functional materials to semiconductor power devices[J]. Journal of Semiconductors, 2022, 43(6): 063101
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