Improving long-term temperature bias stability of an integrated optical gyroscope employing a Si3N4 resonator

Changkun Feng; Yonggui Zhang; Honghao Ma; Hui Li; Lishuang Feng

doi:10.1364/PRJ.456321

[1] T. Kessler, C. Hagemann, C. Grebing, T. Legero, U. Sterr, F. Riehle, M. J. Martin, L. Chen, J. Ye. A sub-40-mHz-linewidth laser based on a silicon single crystal optical cavity. Nat. Photonics, 6, 687-692(2012).

[2] S. Gundavarapu, G. M. Brodnik, M. Puckett, T. Huffman, D. Bose, R. Behunin, J. F. Wu, T. Q. Qiu, C. Pinho, N. Chauhan, J. Nohava, P. T. Rakich, K. D. Nelson, M. Salit, D. J. Blumenthal. Sub-hertz fundamental linewidth photonic integrated Brillouin laser. Nat. Photonics, 13, 60-67(2019).

[3] L. Stern, W. Zhang, D. Carlson, D. Popp, Z. Newman, S. Kang, J. Kitching, S. Papp. Ultranarrow linewidth photonic-atomic laser. Laser Photonics Rev., 14, 1900293(2019).

[4] P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilkins, R. Holzwarth, T. J. Kippenberg. Optical frequency comb generation from a monolithic microresonator. Nature, 450, 1214-1217(2007).

[5] T. J. Kippenberg, A. L. Gaeta, M. Lipson, M. L. Gorodetsky. Dissipative Kerr solitons in optical microresonators. Science, 361, eaan8083(2018).

[6] D. R. Carlson, D. D. Hickstein, L. Alex, D. Stefan, W. Daron, N. Nima, C. Ian, N. R. Newbury, S. Kartik, S. A. Diddams. Self-referenced frequency combs using high-efficiency silicon-nitride waveguides. Opt. Lett., 42, 2314-2317(2017).

[7] Y. H. Lai, M. G. Suh, Y. K. Lu, B. Shen, K. Vahala. Earth rotation measured by a chip-scale ring laser gyroscope. Nat. Photonics, 14, 345-349(2020).

[8] S. M. Lo, S. Hu, G. Gaur, Y. Kostoulas, P. M. Fauchet. Photonic crystal microring resonator for label-free biosensing. Opt. Express, 25, 7046-7054(2017).

[9] Z. Tu, D. Gao, M. Zhang, D. Zhang. High-sensitivity complex refractive index sensing based on Fano resonance in the subwavelength grating waveguide micro-ring resonator. Opt. Express, 25, 20911-20922(2017).

[10] P. P. Khial, A. D. White, A. Hajimiri. Nanophotonic optical gyroscope with reciprocal sensitivity enhancement. Nat. Photonics, 12, 671-675(2018).

[11] J. T. Geng, L. Yang, S. H. Zhao, Y. G. Zhang. Resonant micro-optical gyro based on self-injection locking. Opt. Express, 28, 32907-32915(2020).

[12] G. Sagnac. On the proof of the reality of the luminiferous aether by the experiment with a rotating interferometer. Comptes Rendus, 157, 1410-1413(1913).

[13] G. A. Sanders, M. G. Prentiss, S. Ezekiel. Passive ring resonator method for sensitive inertial rotation measurements in geophysics and relativity. Opt. Lett., 6, 569-571(1981).

[14] A. Li, W. Bogaerts. Using backscattering and backcoupling in silicon ring resonators as a new degree of design freedom. Laser Photonics Rev., 13, 1800244(2019).

[15] A. Li, V. V. Thomas, D. H. Peter, B. Peter, B. Wim. Backscattering in silicon microring resonators: a quantitative analysis. Laser Photonics Rev., 10, 420-431(2016).

[16] J. J. Wang, L. S. Feng, Q. W. Wang, H. C. Jiao, X. Wang. Suppression of backreflection error in resonator integrated optic gyro by the phase difference traversal method. Opt. Lett., 41, 1586-1589(2016).

[17] L. S. Feng, M. Lei, H. L. Liu, Y. Z. Zhou, J. J. Wang. Suppression of back-reflection noise in a resonator integrated optic gyro by hybrid phase-modulation technology. Appl. Opt., 52, 1668-1675(2013).

[18] C. K. Feng, D. K. Zhang, Y. G. Zhang, C. Qing, H. H. Ma, H. Li, L. S. Feng. Resonant integrated optical gyroscope based on Si₃N₄ waveguide ring resonator. Opt. Express, 29, 43875-43884(2021).

[19] C. K. Feng, D. N. Liu, H. H. Ma, C. Qing, H. Li, L. S. Feng. Design, fabrication and test of transmissive Si₃N₄ waveguide ring resonator. IEEE Sens. J., 21, 22918-22926(2021).

[20] J. R. Haavisto. Thin film waveguides for inertial sensors. Proc. SPIE, 412, 221-228(1983).

[21] A. Morand, C. Sanchez-Perez, P. Benech, S. Tedjini, D. Bose. Integrated optical waveguide polarizer on glass with a birefringent polymer overlay. IEEE Photonics Technol. Lett., 10, 1599-1601(1998).

[22] H. Lee, T. Chen, J. Li, K. Y. Yang, S. Jeon, O. Painter, K. J. Vahala. Chemically etched ultrahigh-Q wedge-resonator on a silicon chip. Nat. Photonics, 6, 369-373(2012).

[23] B. Stern, X. C. Ji, A. Dutt, M. Lipson. Compact narrow-linewidth integrated laser based on a low-loss silicon nitride ring resonator. Opt. Lett., 42, 4541-4544(2017).

[24] E. H. Dirani, L. Youssef, C. Petit-Etienne, K. Sebastien, G. Philippe, M. Christelle, P. Erwine, S. Corrado. Ultralow-loss tightly confining Si₃N₄ waveguides and high-Q microresonators. Opt. Express, 27, 30726-30740(2019).

[25] H. L. Ma, W. Y. Wang, Y. Ren, Z. H. Jin. Low-noise low-delay digital signal processor for resonant micro optic gyro. IEEE Photonics Technol. Lett., 25, 198-201(2013).

[26] Q. Wang, L. S. Feng, H. Li, X. Wang, Y. Z. Jia, D. N. Liu. Enhanced differential detection technique for the resonator integrated optic gyro. Opt. Lett., 43, 2941-2944(2018).

[27] X. C. Ji, S. Roberts, M. Corato-Zanarella, M. Lipson. Methods to achieve ultra-high quality factor silicon nitride resonators. APL Photonics, 6, 071101(2021).

[28] A. Mohanty, Q. Li, M. A. Tadayon, S. P. Roberts, G. R. Bhatt, E. Shim, X. C. Ji, J. Cardenas, S. A. Miller, A. Kepecs, M. Lipson. Reconfigurable nanophotonic silicon probes for sub-millisecond deep-brain optical stimulation. Nat. Biomed. Eng., 4, 223-231(2020).

[29] X. C. Ji, X. W. Yao, Y. Gan, A. Mohanty, M. A. Tadayon, C. P. Hendon, M. Lipson. On-chip tunable photonic delay line. APL Photonics, 4, 090803(2019).

[30] X. Ji, F. A. S. Barbosa, S. P. Roberts, A. Dutt, J. Cardenas, Y. Okawachi, A. Bryant, A. L. Gaeta, M. Lipson. Ultra-low-loss on-chip resonators with sub-milliwatt parametric oscillation threshold. Optica, 4, 619-624(2017).

[31] M. H. P. Pfeiffer, J. Q. Liu, A. S. Raja, T. Morais, B. Ghadiani, T. J. Kippenberg. Ultra-smooth silicon nitride waveguides based on the damascene reflow process: fabrication and loss origins. Optica, 5, 884-892(2018).

[32] M. Sinclair, K. Gallacher, M. Sorel, J. C. Bayley, E. McBrearty, R. W. Millar, S. Hild, D. J. Paul. 1.4 million Q factor Si₃N₄ micro-ring resonator at 780 nm wavelength for chip-scale atomic systems. Opt. Express, 28, 4010-4020(2020).

[33] K. Wu, A. W. Poon. Stress-released Si₃N₄ fabrication process for dispersion-engineered integrated silicon photonics. Opt. Express, 28, 17708-17722(2020).

[34] J. F. Bauters, M. J. R. Heck, D. D. John, J. S. Barton, C. M. Bruinink, A. Leinse, R. G. Heideman, D. J. Blumenthal, J. E. Bowers. Planar waveguides with less than 0.1 dB/m propagation loss fabricated with wafer bonding. Opt. Express, 19, 24090-24101(2011).

[35] D. T. Spencer, J. F. Bauters, M. J. R. Heck, J. E. Bowers. Integrated waveguide coupled Si₃N₄ resonators in the ultrahigh-Q regime. Optica, 1, 153-157(2014).

[36] M. W. Puckett, K. K. Liu, N. Chauhan, Q. C. Zhao, N. J. Jin, H. T. Cheng, J. F. Wu, R. O. Behunin, P. T. Rakich, K. D. Nelson, D. J. Blumenthal. 422 million intrinsic quality factor planar integrated all-waveguide resonator with sub-MHz linewidth. Nat. Commun., 12, 934(2021).

[37] L. S. Feng, J. J. Wang, Y. Z. Zhi, Y. C. Tang, Q. W. Wang, H. C. Li, W. Wang. Transmissive resonator optic gyro based on silica waveguide ring resonator. Opt. Express, 22, 27565-27575(2014).