• Acta Optica Sinica
  • Vol. 44, Issue 9, 0904001 (2024)
Zheng Li1, Danlu Liu1, Jie Dong1, Dajing Bian1, and Yue Xu1,2,*
Author Affiliations
  • 1College of Integrated Circuit Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, Jiangsu, China
  • 2National and Local Joint Engineering Laboratory of RF Integration & Micro-Assembly Technology, Nanjing 210023, Jiangsu, China
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    DOI: 10.3788/AOS231800 Cite this Article Set citation alerts
    Zheng Li, Danlu Liu, Jie Dong, Dajing Bian, Yue Xu. A P-I-N Structure Single-Photon Avalanche Diode Detector with Low Dark Count Rate[J]. Acta Optica Sinica, 2024, 44(9): 0904001 Copy Citation Text show less
    References

    [1] Zhang W Y, Wang Y, Jin X L. Design and optimization of double-wave-peak response CMOS single-photon detector[J]. Acta Optica Sinica, 41, 1704001(2021).

    [2] Gramuglia F, Wu M L, Bruschini C et al. A low-noise CMOS SPAD pixel with 12.1 ps SPTR and 3 ns dead time[J]. IEEE Journal of Selected Topics in Quantum Electronics, 28, 3800809(2022).

    [3] Liu Y, Liu M L, Ma R et al. A wide spectral response single photon avalanche diode for backside-illumination in 55-nm CMOS process[J]. IEEE Transactions on Electron Devices, 69, 5041-5047(2022).

    [4] Sun W B, Wang Y X, Liu M L et al. A back-illuminated 4 μm P+N-well single photon avalanche diode pixel array with 0.36 Hz/μm² dark count rate at 2.5 V excess bias voltage[J]. IEEE Electron Device Letters, 43, 1519-1522(2022).

    [5] Wu J Y, Liu C H. Design and characterization of n/p-well CMOS SPAD with low dark count rate and high photon detection efficiency[J]. IEEE Transactions on Electron Devices, 70, 582-587(2023).

    [6] Veerappan C, Charbon E. A low dark count P-I-N diode based SPAD in CMOS technology[J]. IEEE Transactions on Electron Devices, 63, 65-71(2016).

    [7] Vornicu I, López-Martínez J M, Bandi F N et al. Design of high-efficiency SPADs for LiDAR applications in 110 nm CIS technology[J]. IEEE Sensors Journal, 21, 4776-4785(2021).

    [8] Gramuglia F, Keshavarzian P, Kizilkan E et al. Engineering breakdown probability profile for PDP and DCR optimization in a SPAD fabricated in a standard 55 nm BCD process[J]. IEEE Journal of Selected Topics in Quantum Electronics, 28, 3802410(2022).

    [9] Sicre M, Federspiel X, Mamdy B et al. Characterization and modeling of DCR and DCR drift variability in SPADs[C](2023).

    [10] Sun F Y, Xu Y, Wu Z et al. A simple analytic modeling method for SPAD timing jitter prediction[J]. IEEE Journal of the Electron Devices Society, 7, 261-267(2019).

    [11] Deng S J, Li X, Chen M et al. Design and analysis of an afterpulsing auto-correction system for single photon avalanche diodes[J]. IEEE Photonics Technology Letters, 33, 293-296(2021).

    [12] Kang Y, Xue R K, Li L F et al. Coaxial scanning three-dimensional imaging based on SPAD array[J]. Laser & Optoelectronics Progress, 58, 1011024(2021).

    [13] Fu S, Tian X R, Yang J et al. Laser velocimetry based on single-photon array camera[J]. Laser & Optoelectronics Progress, 60, 0811023(2023).