• Laser & Optoelectronics Progress
  • Vol. 60, Issue 7, 0731002 (2023)
Junchen Liao1, Rui Qian2, Dong Chen1, Haijin Chen1, Guoping Luo1、*, and Weiling Zhu1
Author Affiliations
  • 1School of Science, Guangdong University of Petrochemical Technology, Maoming 525000, Guangdong, China
  • 2State Key Laboratory of Luminescent Materials and Devices, South China University of Technology, Guangzhou 510640, Guangdong, China
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    DOI: 10.3788/LOP213361 Cite this Article Set citation alerts
    Junchen Liao, Rui Qian, Dong Chen, Haijin Chen, Guoping Luo, Weiling Zhu. Magnetron Sputtering Preparation and Photoelectric Property Optimization of GAZO/Ag/GAZO Transparent Conductive Thin Films[J]. Laser & Optoelectronics Progress, 2023, 60(7): 0731002 Copy Citation Text show less
    References

    [1] Bi Y G, Liu Y F, Zhang X L et al. Ultrathin metal films as the transparent electrode in ITO-free organic optoelectronic devices[J]. Advanced Optical Materials, 7, 1800778(2019).

    [2] Yun J. Ultrathin metal films for transparent electrodes of flexible optoelectronic devices[J]. Advanced Functional Materials, 27, 1606641(2017).

    [3] Luo G P, Zhang M H, Liang Q B et al. Effect of radio frequency power and working pressure on characteristics of Ga and Al Co-doped ZnO thin films[J]. Materials Reports, 34, 12020-12024(2020).

    [4] Kim K H, Choi H W, Kim K H. Characteristics of Ga-Al doped ZnO thin films with plasma treatment prepared by using facing target sputtering method[J]. Journal of Nanoscience and Nanotechnology, 13, 6293-6295(2013).

    [5] Li J, Yang Y, Zhu K et al. The research highlights and development tendencies of ZnO based transparent conductive films[J]. Scientia Sinica (Technologica), 45, 941-950(2015).

    [6] Jung Y S, Choi H W, Kim K H. Effects of intermediate GAZO layer thickness on the properties of GAZO/Ag/GAZO/Ag/GAZO film[J]. Thin Solid Films, 549, 70-73(2013).

    [7] Lung C, Toma M, Pop M et al. Characterization of the structural and optical properties of ZnO thin films doped with Ga, Al and (Al+Ga)[J]. Journal of Alloys and Compounds, 725, 1238-1243(2017).

    [8] Li X. Preparation and application of GZO transparent conductive thin films[D], 14-15(2014).

    [9] Sahoo S K, Gupta C A, Singh U P. Impact of Al and Ga co-doping with different proportion in ZnO thin film by DC magnetron sputtering[J]. Journal of Materials Science: Materials in Electronics, 27, 7161-7166(2016).

    [10] Ebrahimifard R, Golobostanfard M R, Abdizadeh H. Sol-gel derived Al and Ga co-doped ZnO thin films: an optoelectronic study[J]. Applied Surface Science, 290, 252-259(2014).

    [11] Muchuweni E, Sathiaraj T S, Nyakotyo H. Low temperature synthesis of ZnO nanowires on GAZO thin films annealed at different temperatures for solar cell application[J]. Materials Science in Semiconductor Processing, 68, 80-86(2017).

    [12] Ayachi B, Aviles T, Vilcot J P et al. Rapid thermal annealing effect on the spatial resistivity distribution of AZO thin films deposited by pulsed-direct-current sputtering for solar cells applications[J]. Applied Surface Science, 366, 53-58(2016).

    [13] Ghosh D S, Liu Q, Mantilla-Perez P et al. Highly flexible transparent electrodes containing ultrathin silver for efficient polymer solar cells[J]. Advanced Functional Materials, 25, 7309-7316(2015).

    [14] Kao P C, Hsieh C J, Chen Z H et al. Improvement of MoO3/Ag/MoO3 multilayer transparent electrodes for organic solar cells by using UV-ozone treated MoO3 layer[J]. Solar Energy Materials and Solar Cells, 186, 131-141(2018).

    [15] Dhar A, Alford T L. Optimization of Nb2O5/Ag/Nb2O5 multilayers as transparent composite electrode on flexible substrate with high figure of merit[J]. Journal of Applied Physics, 112, 103113(2012).

    [16] Guo K, Yu T, Song B B et al. Fabrication and opto-electronic properties of ZnO/Ag/ZnO composite films at room temperature[J]. Laser & Optoelectronics Progress, 54, 103102(2017).

    [17] Lim J W, Oh S I, Eun K et al. Mechanical flexibility of ZnSnO/Ag/ZnSnO films grown by roll-to-roll sputtering for flexible organic photovoltaics[J]. Japanese Journal of Applied Physics, 51, 115801(2012).

    [18] Zhang C, Zhao D W, Gu D E et al. An ultrathin, smooth, and low-loss Al-doped Ag film and its application as a transparent electrode in organic photovoltaics[J]. Advanced Materials, 26, 5696-5701(2014).

    [19] Yu S H, Zhao L, Liu R C et al. Performance enhancement of Cu-based AZO multilayer thin films via graphene fence engineering for organic solar cells[J]. Solar Energy Materials and Solar Cells, 183, 66-72(2018).

    [20] Li Y T, Han C F, Lin J F. Effects of nitrogen/oxygen on the electrical and optical properties and microstructure of triple layer AZO/Ag/AZO thin films[J]. Optical Materials Express, 10, 249-267(2020).

    [21] Park S H, Lee S M, Ko E H et al. Roll-to-Roll sputtered ITO/Cu/ITO multilayer electrode for flexible, transparent thin film heaters and electrochromic applications[J]. Scientific Reports, 6, 33868(2016).

    [22] Kim K D, Pfadler T, Zimmermann E et al. Decoupling optical and electronic optimization of organic solar cells using high-performance temperature-stable TiO2/Ag/TiO2 electrodes[J]. APL Materials, 3, 106105(2015).

    [23] Jo H, Yang J H, Choi S W et al. Highly transparent and conductive oxide-metal-oxide electrodes optimized at the percolation thickness of AgOx for transparent silicon thin-film solar cells[J]. Solar Energy Materials and Solar Cells, 202, 110131(2019).

    [24] Wang L W, Chen W D, Li L. Investigation of the optical and electrical properties of ZnO/Cu/ZnO multilayer structure for transparent conductive electrodes by magnetron sputtering[J]. Journal of Materials Science: Materials in Electronics, 28, 3458-3466(2017).

    [25] Wang C F, Hu B, Chen L G et al. The investigation of ZnS/Au/ZnS transparent conductive films with different Au layer thickness[J]. Japanese Journal of Applied Physics, 59, 055505(2020).

    [26] Bulíř J, Novotný M, Lančok J et al. Nucleation of ultrathin silver layer by magnetron sputtering in Ar/N2 plasma[J]. Surface and Coatings Technology, 228, S86-S90(2013).

    [27] Mendil D, Challali F, Touam T et al. Preparation of RF sputtered AZO/Cu/AZO multilayer films and the investigation of Cu thickness and substrate effects on their microstructural and optoelectronic properties[J]. Journal of Alloys and Compounds, 860, 158470(2021).

    [28] Wang W, Song M, Bae T S et al. Transparent ultrathin oxygen-doped silver electrodes for flexible organic solar cells[J]. Advanced Functional Materials, 24, 1551-1561(2014).

    [29] Kong H, Lee H Y. High performance flexible transparent conductive electrode based on ZnO/AgOx/ZnO multilayer[J]. Thin Solid Films, 696, 137759(2020).

    [30] Zhao G Q, Jeong E, Choi E A et al. Strategy for improving Ag wetting on oxides: coalescence dynamics versus nucleation density[J]. Applied Surface Science, 510, 145515(2020).

    [31] Zhang J, Zhang R, Cui R J et al. Nb2O5/Ag/ZnO multilayer electrodes with surface rearrangement of Ag deposited on flexible substrate[J]. Vacuum, 155, 439-444(2018).

    [32] Hofmann A I, Cloutet E, Hadziioannou G. Materials for transparent electrodes: from metal oxides to organic alternatives[J]. Advanced Electronic Materials, 4, 1700412(2018).

    [33] Yu S J, Xu W M, Zhu H et al. Effect of sputtering power on structure and properties of ZTO films[J]. Journal of Alloys and Compounds, 883, 160622(2021).

    [34] Sun H T, Wang X P, Kou Z Q et al. Optimization of TiO2/Cu/TiO2 multilayers as a transparent composite electrode deposited by electron-beam evaporation at room temperature[J]. Chinese Physics B, 24, 047701(2015).

    [35] Zhao W Y, Zhang M Y, Bi R et al. Infrared Hf-doped ZnO transparent conductive film[J]. Acta Optica Sinica, 41, 2031002(2021).

    [36] Jeon J H, Gong T K, Kong Y M et al. Effect of post-deposition annealing on the structural, optical and electrical properties of IGZO films[J]. Electronic Materials Letters, 11, 481-484(2015).

    [37] Song S M, Yang T L, Xin Y Q et al. Effect of GZO thickness and annealing temperature on the structural, electrical and optical properties of GZO/Ag/GZO sandwich films[J]. Current Applied Physics, 10, 452-456(2010).

    Junchen Liao, Rui Qian, Dong Chen, Haijin Chen, Guoping Luo, Weiling Zhu. Magnetron Sputtering Preparation and Photoelectric Property Optimization of GAZO/Ag/GAZO Transparent Conductive Thin Films[J]. Laser & Optoelectronics Progress, 2023, 60(7): 0731002
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