Magnetron Sputtering Preparation and Photoelectric Property Optimization of GAZO/Ag/GAZO Transparent Conductive Thin Films

Junchen Liao; Rui Qian; Dong Chen; Haijin Chen; Guoping Luo; Weiling Zhu

doi:10.3788/LOP213361

Journals >Laser & Optoelectronics Progress >Volume 60 >Issue 7 >Page 0731002 > Article

Laser & Optoelectronics Progress
Vol. 60, Issue 7, 0731002 (2023)

Magnetron Sputtering Preparation and Photoelectric Property Optimization of GAZO/Ag/GAZO Transparent Conductive Thin Films

Junchen Liao¹, Rui Qian², Dong Chen¹, Haijin Chen¹, Guoping Luo^1、*, and Weiling Zhu¹

Author Affiliations

¹School of Science, Guangdong University of Petrochemical Technology, Maoming 525000, Guangdong, China

²State Key Laboratory of Luminescent Materials and Devices, South China University of Technology, Guangzhou 510640, Guangdong, China

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DOI: 10.3788/LOP213361 Cite this Article Set citation alerts

Junchen Liao, Rui Qian, Dong Chen, Haijin Chen, Guoping Luo, Weiling Zhu. Magnetron Sputtering Preparation and Photoelectric Property Optimization of GAZO/Ag/GAZO Transparent Conductive Thin Films[J]. Laser & Optoelectronics Progress, 2023, 60(7): 0731002 Copy Citation Text

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Influence of N2/O2 flows on optical properties of GAZO/Ag/GAZO thin films. (a) Transmittance spectra; (b) absorption spectra

Fig. 1. Influence of N₂/O₂ flows on optical properties of GAZO/Ag/GAZO thin films. (a) Transmittance spectra; (b) absorption spectra

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Fig. 2. XRD spectra of GAZO/Ag/GAZO thin films

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Fig. 3. Cross-section SEM and surface AFM images of GAZO/Ag/GAZO thin films. SEM images of (a) sample A,(b) sample B, and (c) sample C; AFM images of (d) sample A, (e) sample B, and (f) sample C

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Fig. 4. Optical properties of GAZO/Ag/GAZO thin films as a function of O₂ flows. (a) Transmittance spectra; (b) absorption spectra

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Fig. 5. Influence of O₂ flows on electric properties and FoM of GAZO/Ag/GAZO thin films. (a) Carrier concentration and mobility; (b) resistivity and FoM

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Fig. 6. Influence of Ag thickness on optical properties of GAZO/Ag/GAZO thin films. (a) Transmittance spectra; (b) relation curve between dT/dE and incident light energy

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Fig. 7. Influence of Ag thickness on electric properties andFoM of GAZO/Ag/GAZO thin films. (a) Carriers concentration and mobility; (b) resistivity and FoM

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Fig. 8. Transmittance and XRD spectra of GAZO/Ag/GAZO thin films with different annealing temperatures. (a) Transmittance spectra; (b) XRD spectra

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Sample	Gas	2θ /（°）		β /nm		D /nm		R_rms /nm
Sample	Gas	ZnO	Ag	ZnO	Ag	ZnO	Ag	R_rms /nm
A	Without N₂/O₂	34.54	38.40	0.70	0.90	11.88	9.34	1.24
B	N₂（1.5 sccm）	34.56	38.24	0.79	0.98	10.53	8.58	2.55
C	O₂（1.5 sccm）	34.52	38.28	0.62	0.90	13.41	9.34	5.41

Table 1. Structure and morphology parameters of GAZO/Ag/GAZO thin films

O₂ /sccm	R_sh /（Ω·sq^-1）	T_av /%	ρ /（10^-4 Ω·cm）	n /（10²¹ cm^-3）	μ /（cm²·V^-1·s^-1）	FoM /Ω^-1
0	6.45	96.53	0.58	7.03	15.30	1641
0.5	8.77	92.64	0.79	6.57	12.03	552
1.0	10.07	96.20	0.91	7.08	9.73	957
1.5	11.30	94.11	1.02	6.82	8.96	541
3.0	44.10	76.90	3.97	6.19	2.54	30

Table 2. Relationship between O₂ flows and photoelectric properties of GAZO/Ag/GAZO thin films

Ag thickness /nm	R_sh /（Ω·sq^-1）	ρ /（10^-4 Ω·cm）	n /（10²¹ cm^-3）	μ /（cm²·V^-1·s^-1）	T_av /%	FoM /Ω^-1
6	40.59	3.49	4.00	4.47	80.88	41
8	20.82	1.83	5.07	6.72	87.58	132
10	14.40	1.29	6.20	7.79	95.93	624
12	10.07	0.91	7.08	9.73	96.20	957
14	7.03	0.66	7.86	12.02	84.67	309

Table 3. Relationship between Ag thickness and photoelectric properties of GAZO/Ag/GAZO thin films

Annealing	R_sh/（Ω·sq^-1）	n /（10²¹ cm^-3）	μ /（cm²·V^-1·s^-1）	T_av /%	FoM /Ω^-1	2θ /（°）	β /nm	D /nm
Room temperature	10.07	7.08	9.73	96.20	957	34.25	0.60	13.85
150 ℃	8.99	6.77	11.20	98.17	2260	34.37	0.39	21.26

Table 4. Influence of annealing temperature on photoelectric and structural properties of GAZO/Ag/GAZO thin films

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