Junchen Liao, Rui Qian, Dong Chen, Haijin Chen, Guoping Luo, Weiling Zhu. Magnetron Sputtering Preparation and Photoelectric Property Optimization of GAZO/Ag/GAZO Transparent Conductive Thin Films[J]. Laser & Optoelectronics Progress, 2023, 60(7): 0731002
- Laser & Optoelectronics Progress
- Vol. 60, Issue 7, 0731002 (2023)
Fig. 1. Influence of N2/O2 flows on optical properties of GAZO/Ag/GAZO thin films. (a) Transmittance spectra; (b) absorption spectra
Fig. 2. XRD spectra of GAZO/Ag/GAZO thin films
Fig. 3. Cross-section SEM and surface AFM images of GAZO/Ag/GAZO thin films. SEM images of (a) sample A,(b) sample B, and (c) sample C; AFM images of (d) sample A, (e) sample B, and (f) sample C
Fig. 4. Optical properties of GAZO/Ag/GAZO thin films as a function of O2 flows. (a) Transmittance spectra; (b) absorption spectra
Fig. 5. Influence of O2 flows on electric properties and FoM of GAZO/Ag/GAZO thin films. (a) Carrier concentration and mobility; (b) resistivity and FoM
Fig. 6. Influence of Ag thickness on optical properties of GAZO/Ag/GAZO thin films. (a) Transmittance spectra; (b) relation curve between dT/dE and incident light energy
Fig. 7. Influence of Ag thickness on electric properties andFoM of GAZO/Ag/GAZO thin films. (a) Carriers concentration and mobility; (b) resistivity and FoM
Fig. 8. Transmittance and XRD spectra of GAZO/Ag/GAZO thin films with different annealing temperatures. (a) Transmittance spectra; (b) XRD spectra
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Table 1. Structure and morphology parameters of GAZO/Ag/GAZO thin films
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Table 2. Relationship between O2 flows and photoelectric properties of GAZO/Ag/GAZO thin films
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Table 3. Relationship between Ag thickness and photoelectric properties of GAZO/Ag/GAZO thin films
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Table 4. Influence of annealing temperature on photoelectric and structural properties of GAZO/Ag/GAZO thin films
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