[1] Liu Ninglin. Research on infrared muller matrix spectroscopic ellipsometer[D]. Huazhong: Huazhong University of Science Technology, 2019. (in Chinese)

[2] Suyong Wu, Xingwu Long, Kaiyong Yang. An error processing technique for ellipsometry measurement system which minimizes the error of optical parameter characterization of thin films. Acta Optica Sinica, 32, 280(2012).

[3] Fan Zhentao. Research on the advanced parameters problem of muller matrix ellipsometry system[D]. Beijing: University of Chinese Academy of Sciences , 2019. (in Chinese)

[4] W Li, C Zhang, H Jiang. Depolarization artifacts in dual rotating compensator Mueller matrix ellipsometry. Journal of Optics, 18, 055701(2016).

[5] S Y Liu, X G Chen, C W Zhang. Development of a broadband Mueller matrix ellipsometer as a powerful tool for nano structure metrology. Thin Solid Films, 584, 176-185(2015).

[6] Lina Dai, Jianxun Deng, Juan Wang. The optical constants and Euler angles of anisotropic thin films were studied by using a single wavelength ellipsometer. Journal of South China Normal University (Natural Science Edition), 51, 14-20(2019).

[7] Tang Zhen. Mul-tipoint calibration method based on stok-es ellipsometry measurement system. Chinese Journal of Lasers, 39, 163-167(2012).

[8] F K I Urban, D Barton. Numerical ellipsometry: Use of parameter sensitivity to guide measurement selection for transparent anisotropic films. Thin Solid Films, 663, 116-125(2018).

[9] Meng Fanxue. A hybrid algithm f solving nonlinear least squares problems[D]. Shanghai: Shanghai Jiao Tong University, 2011. (in Chinese)

[10] Liu Yang, Yanping Chen. A new globally con-vergent levenberg-marquardt method for sovling nonlinear system of equations. Mathematica Numerica Sinica, 30, 388-396(2008).

[11] Ruizhi Zhang, Jinsheng Luo, Minlin Chen. Calibr-ation method for azimuth angle of a rotary polarizer-type automatic ellipsometer polarizer-type. Journal of Applied Optics, 36-39,73(1988).

[12] R M A Azzam, Ali G Lopez. Accuratecalibration of the four-detector photopola-rimeter with imperfect polarizing optical elements. Journal of the Optical Society of America A, 6, 1513-1521(1989).

[13] S Krishnan. Calibration, properties, and applications of the division-of-amplitude photopolarimeter at 632.8 and 1523 nm. Journal of the Optical Society of America A, 9, 001615(1992).

[14] R M A Azzam, E Masetti, I M Elminyawi. Construction, calibration, and testing of a four etector photopolarimeter. Review of Scientific Instruments, 59, 84-88(1988).

[15] R M A Azzam. Arrangement of four photodetectors for measuring the state of polarization of light. Optics Letters, 10, 309-311(1985).

[16] Liao Yanbiao. Polarization of Optics[M]. Beijing: Science Press, 2003. (in Chinese)