Yuqing Guan, Dongmei Tang, Yunxia Fu, Jiayuan Sun, Zhiguo Han, Bo Zhang, Ming Kong, Chengming Cao, Lihua Lei. Study on LM algorithm in Mueller''''s ellipsometry calibration method[J]. Infrared and Laser Engineering, 2020, 49(8): 20200204
- Infrared and Laser Engineering
- Vol. 49, Issue 8, 20200204 (2020)
Fig. 1. Light path diagram of light beam in ellipsoidal system
Fig. 2. Flow chart of LM algorithm
Fig. 3. Flow chart of experiment
Fig. 4. Mueller spectrum of 25 nm SiO2/Si film thick sample
Fig. 5. Residual sum of squares iteration
Fig. 6. Change diagram of step absolute value
Fig. 7. Mueller spectrum of 91 nm SiO2/Si standard sample
Fig. 8. Spot chart of the change of the sum of squares of light intensity residuals
Fig. 9. Mueller spectrum with depolarization of 91 nm SiO2/Si standard sample
Fig. 10. Error matrix spectrum of 91 nm SiO2/Si standard sample
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Table 1.
Calculated values of various parameters of components
元件各参数计算值
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