Gaoyuan Yang, Maoqi Cai, Jinyu Li, Huoyao Chen, Ying Liu, Yilin Hong. Preparation of Subwavelength Nanostructures Based on Low-Energy Ion Bombardment[J]. Acta Optica Sinica, 2020, 40(17): 1736001
- Acta Optica Sinica
- Vol. 40, Issue 17, 1736001 (2020)
Fig. 1. Schematic diagram of the fabrication of fused silica subwavelength nanostructures based on ion bombardment
Fig. 2. Temporal evolution of nanoripples morphology on photoresist surface. (a) t=0; (b) t=10 min; (c) t=20 min; (d) t=30 min; (e) t=50 min
Fig. 3. RMS roughness and wavelength of nanoripple morphologies on photoresist surface versus ion bombardment time
Fig. 4. AFM pictures of sample after different processes treatment. (a) IB; (b) RIE; (c) RIBE
Fig. 5. Measured spectral transmittance of initial and single-sided fused silica nanostructures
Set citation alerts for the article
Please enter your email address
© Copyright 2018-2021 | Chinese Laser Press. All Rights Reserved 沪ICP备15018463号-20