Preparation of Subwavelength Nanostructures Based on Low-Energy Ion Bombardment

Gaoyuan Yang; Maoqi Cai; Jinyu Li; Huoyao Chen; Ying Liu; Yilin Hong

doi:10.3788/AOS202040.1736001

Journals >Acta Optica Sinica >Volume 40 >Issue 17 >Page 1736001 > Article

Acta Optica Sinica
Vol. 40, Issue 17, 1736001 (2020)

Preparation of Subwavelength Nanostructures Based on Low-Energy Ion Bombardment

Gaoyuan Yang, Maoqi Cai, Jinyu Li, Huoyao Chen, Ying Liu^*, and Yilin Hong

Author Affiliations

National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei, Anhui 230029, China

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DOI: 10.3788/AOS202040.1736001 Cite this Article Set citation alerts

Gaoyuan Yang, Maoqi Cai, Jinyu Li, Huoyao Chen, Ying Liu, Yilin Hong. Preparation of Subwavelength Nanostructures Based on Low-Energy Ion Bombardment[J]. Acta Optica Sinica, 2020, 40(17): 1736001 Copy Citation Text

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Gaoyuan Yang, Maoqi Cai, Jinyu Li, Huoyao Chen, Ying Liu, Yilin Hong. Preparation of Subwavelength Nanostructures Based on Low-Energy Ion Bombardment[J]. Acta Optica Sinica, 2020, 40(17): 1736001

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