• Laser & Optoelectronics Progress
  • Vol. 59, Issue 3, 0300003 (2022)
Lili Zhang1、2, Shufeng Sun1、2、*, Xi Wang1、2, Fengyun Zhang1、2, Pingping Wang2, Chengming Cao3、4, and Zibin Zhang5
Author Affiliations
  • 1School of Mechanical and Automotive Engineering, Qingdao University of Technology, Qingdao , Shandong 266520, China
  • 2Shandong Research Center of Laser Green and High Efficiency Intelligent Manufacturing Engineering Technology, Qingdao , Shandong 266520, China
  • 3School of Mechanical and Electrical Engineering, China University of Mining and Technology, Xuzhou , Jiangsu 221116, China
  • 4Shandong Energy Heavy Industry Group Hengtu Technology Co., Ltd., Taian, Shandong 271222, China
  • 5Qingdao Gocci Opto-Electronics Technology Co., Ltd., Qingdao , Shandong 266109, China
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    DOI: 10.3788/LOP202259.0300003 Cite this Article Set citation alerts
    Lili Zhang, Shufeng Sun, Xi Wang, Fengyun Zhang, Pingping Wang, Chengming Cao, Zibin Zhang. Research Progress of Laser Micro-Nano Connection Technology[J]. Laser & Optoelectronics Progress, 2022, 59(3): 0300003 Copy Citation Text show less

    Abstract

    Laser micro-nano connection connection technology is the basis for mass production of micro-nano structures and electronic components, and is a key technology in the field of micro-nano manufacturing. Based on a brief introduction to the application requirements and main technical methods of micro-nano connection technology, this paper focuses on the analysis and discussion of the micro-nano-scale laser connection technology. Firstly, the dimension range of laser connection technology is introduced, and then three typical laser micro-nano connection technologies are selected according to the different process characteristics, namely laser micro welding technology, micro-nano-scale laser soldering technology and laser soldering bumping technology, the research on the processing principles and characteristics, process parameters and application status of the three technology are reviewed, respectively. Through the summary of the research and application status of laser micro-nano connection technology, this paper discusses the important role of laser micro-nano connection technology in the field of aerospace, microelectronic packaging, medical device,etc., and summarizes the development direction and future research work of laser micro-nano connection technology.
    Lili Zhang, Shufeng Sun, Xi Wang, Fengyun Zhang, Pingping Wang, Chengming Cao, Zibin Zhang. Research Progress of Laser Micro-Nano Connection Technology[J]. Laser & Optoelectronics Progress, 2022, 59(3): 0300003
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