Rongqing Yi, Yang Wang, Zhixiang Cao, Xiangliang Jin. Design and Verification of Single-Photon Avalanche Diode with High Gain at Low Overbias Voltage[J]. Acta Optica Sinica, 2023, 43(23): 2313001
- Acta Optica Sinica
- Vol. 43, Issue 23, 2313001 (2023)
Fig. 1. Three-dimensional cross-sectional schematic of SPAD
Fig. 2. Simulated I-V curve of SPAD
Fig. 3. Device simulation results of TCAD. (a) Electric field distribution; (b) impact ionization distribution; (c) current density distribution; (d) photon absorption rate
Fig. 4. Light generation and absorption rate distribution of SPAD device
Fig. 5. Microscope and layout images of device. (a) Microscope image; (b) layout image
Fig. 6. Test platform of SPAD. (a) Schematic of passive quenching circuit; (b) test platform of passive quenching circuit
Fig. 7. I-V characteristic test curve of SPAD
Fig. 8. PDP test results of SPAD device
Fig. 9. Dark count rate (DCR) of SPAD device
Fig. 10. Schematic diagram of mixed simulation model
Fig. 11. Pulse curve simulated by SPAD model
Fig. 12. Measured curve and model simulation curve of SPAD
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Table 1. Comparison of PDP test results of reported SPADs and proposed SPAD
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