Xiaodong Liu, Liang Chen, Xizhao Wang, Zhengjun Xiong. Study on Technology of Picosecond Laser Making Micro-Hole with Helical Drilling[J]. Laser & Optoelectronics Progress, 2022, 59(7): 0714005
- Laser & Optoelectronics Progress
- Vol. 59, Issue 7, 0714005 (2022)
Fig. 1. Picosecond laser processing experimental machine
Fig. 2. Effect of deflection of wedge prism 1 on diameter
Fig. 3. Three micro-hole models. (a) Negative conical; (b) cylindrical drilling; (c) positive conical
Fig. 4. Relationship between pulse energy and diameters of entrance and exit
Fig. 5. Ways of pulse laser processing. (a) Energy density distribution of Gaussian beam;(b) trajectory of laser spot scanning by helical drilling method
Fig. 6. Relationship between defocusing amount and diameters of entrance and exit
Fig. 7. Profile of micro-holes under different defocusing amounts
Fig. 8. Defocus forms. (a)
Fig. 9. Effects of laser pulse. (a) Superposition of laser pulse intensity; (b) helical path of laser spot
Fig. 10. Relationship between repetition frequency and color rendering of entrance and exit
Fig. 11. Relationship between recast layer of entrance and laser helical speed
Fig. 12. Relationship between angle position of wedge prism 1 and diameters of entrance and exit
Fig. 13. Relationship between beam parallel shift of M2 and diameters of entrance and exit
Fig. 14. Profile of micro-holes under different beam parallel shifts of M2
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Table 1. Basic performance parameters of laser
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Table 2. Processing parameters of helical drilling system
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