Transfer process of LT-GaAs epitaxial films for on-chip terahertz antenna integrated device

GUO Chun-Yan; XU Jian-Xing; PENG Hong-Ling; NI Hai-Qiao; WANG Tao; TIAN Jin-Shou; NIU Zhi-Chuan; WU Zhao-Xin; ZUO Jian; ZHANG Cun-Lin

doi:10.11972/j.issn.1001-9014.2017.02.016

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