3-μm mid-infrared polarization-independent and CMOS-compatible graphene modulator

Rong-Guo LU; Rui LIN; Li-Ming SHEN; Song-Wei CAI; Yu-Jiao WANG; Jin-Zhan CHEN; Zhong-Hua YANG; Jiang-Bo LYU; Yong ZHOU; Xiao-Ju WANG; Yong LIU

doi:10.11972/j.issn.1001-9014.2021.03.003

Journals >Journal of Infrared and Millimeter Waves >Volume 40 >Issue 3 >Page 297 > Article

Journal of Infrared and Millimeter Waves
Vol. 40, Issue 3, 297 (2021)

μ m

mid-infrared polarization-independent and CMOS-compatible graphene modulator

Rong-Guo LU^1、*, Rui LIN¹, Li-Ming SHEN¹, Song-Wei CAI¹, Yu-Jiao WANG¹, Jin-Zhan CHEN¹, Zhong-Hua YANG², Jiang-Bo LYU¹, Yong ZHOU¹, Xiao-Ju WANG¹, and Yong LIU¹

Author Affiliations

¹State Key Laboratory of Electronic Thin Films and Integrated Devices， School of Optoelectronic Science and Engineering， University of Electronic Science and Technology of China， Chengdu 610054， China

²Chongqing United Microelectronics Center， Chongqing 401332， China

show less

DOI: 10.11972/j.issn.1001-9014.2021.03.003 Cite this Article

Rong-Guo LU, Rui LIN, Li-Ming SHEN, Song-Wei CAI, Yu-Jiao WANG, Jin-Zhan CHEN, Zhong-Hua YANG, Jiang-Bo LYU, Yong ZHOU, Xiao-Ju WANG, Yong LIU. 3-

μ m

mid-infrared polarization-independent and CMOS-compatible graphene modulator[J]. Journal of Infrared and Millimeter Waves, 2021, 40(3): 297 Copy Citation Text

EndNote(RIS)

BibTex

Plain Text

show less

（a） Schematic diagram of our proposed device，（b） schematic diagram of mode conversion structure，（c） cross-sectional schematic diagram of the graphene modulator

Fig. 1. （a） Schematic diagram of our proposed device，（b） schematic diagram of mode conversion structure，（c） cross-sectional schematic diagram of the graphene modulator

Download full size | View in the Article

（a） Under the wavelength of 2.95 μm， 3 μm， 3.05 μm， the in-plane dielectric constant changes with the applied voltage，（b） the variation of the absorption coefficient for both TE0 and TM0 mode of graphene modulator under different chemical potential

Fig. 2. （a） Under the wavelength of 2.95

μ m

， 3

μ m

， 3.05

μ m

， the in-plane dielectric constant changes with the applied voltage，（b） the variation of the absorption coefficient for both TE₀ and TM₀ mode of graphene modulator under different chemical potential

Download full size | View in the Article

$（a） The variation of effective refractive index for the first five modes in the width range from 1.4 μm to 3.4 μm，（b） analyzing the influence on coupling efficiency by sweeping the coupling length，（c） analyzing the influence on conversion efficiency by sweeping the length of three parts$

Fig. 3. （a） The variation of effective refractive index for the first five modes in the width range from 1.4

μ m

to 3.4

μ m

，（b） analyzing the influence on coupling efficiency by sweeping the coupling length，（c） analyzing the influence on conversion efficiency by sweeping the length of three parts

Download full size | View in the Article

Fig. 4. （a） The variation of insertion loss of various parts for the device under the wavelength from 2.95