Local Level Set Based Mask Optimization with Semi-Implicit Discretization

Yijiang Shen; Xiaopeng Wang; Yanzhou Zhou; Zhenrong Zhang

doi:10.3788/AOS202141.0911004

Journals >Acta Optica Sinica >Volume 41 >Issue 9 >Page 0911004 > Article

Acta Optica Sinica
Vol. 41, Issue 9, 0911004 (2021)

Local Level Set Based Mask Optimization with Semi-Implicit Discretization

Yijiang Shen^1、*, Xiaopeng Wang¹, Yanzhou Zhou¹, and Zhenrong Zhang²

Author Affiliations

¹School of Automation, Guangdong University of Technology, Guangzhou, Guangdong 510006, China

²School of Computer, Electronics and Information, Guangxi University, Nanning, Guangxi 530004, China

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DOI: 10.3788/AOS202141.0911004 Cite this Article Set citation alerts

Yijiang Shen, Xiaopeng Wang, Yanzhou Zhou, Zhenrong Zhang. Local Level Set Based Mask Optimization with Semi-Implicit Discretization[J]. Acta Optica Sinica, 2021, 41(9): 0911004 Copy Citation Text

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Yijiang Shen, Xiaopeng Wang, Yanzhou Zhou, Zhenrong Zhang. Local Level Set Based Mask Optimization with Semi-Implicit Discretization[J]. Acta Optica Sinica, 2021, 41(9): 0911004

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